Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
11-3ASM_A412_ALOY_01S1
Process: ANNEAL
Tool config is based on original PO, please verify tool details at tool inspection
System, General Specification
Safety Specification: SEMI S2-0200/ CE-Mark (STD)
Heater Model: MLR
Process Condition: AP
ART Control: None
N2 Load Lock: Yes
Wafer Type: 300mm-Si SEMI STD-Notch
Qty. of Production Wafers: 150wfr
Side Maintenance: None
Software Version (WAVES): Latest
Boat Operation: 2 Boat Type
Temperature Controller: MTC
System, Unit Location
Furnace: Main-Fab
Power Box: Sub-Fab
Pump: N/A
FTR: Sub-Fab
Step Up Transformer: N/A
Step Down Transformer: N/A
Ozone Delivery System: N/A
WVG Controller: N/A
Liquid Delivery System: N/A
UPS: None
System, Factory Automation
Host Communications: Comply with GJG
Group Controller Connection: None
OHT Capability: Yes
AGV Capability: None
RGV Capability: None
PGV Capability: None
PIO I/F Location: FNC Top
PIO Provided by: Customer
PIO Maker/Model: N/A
Carrier ID Reader Writer Type: RF
CIDRW Load Port: Read
CIDRW FIMS: Write
CIDRW Maker/Model: Asyst/ATR9100
CIDRW Provided by: ASM
FDC: FDC(Fault Detection and Classification)=N/A
System, User Interface
Signal Tower Model: Insatlled / 4-Color
Signal Tower Colors: Signal Tower Colors (from the Top), Red/Yellow/Green/Blue
Signal Tower Location: (Furnace Front/ Operation Panel Type)
Front Operation Panel: Yes
MMI and Gas FlowChart: FPD & GFC Installed
Operator SW: Standard
Pressure Display Unit: MPa / Pa
Warning Label: English
System, Furnace
Dewpoint Meter for N2 LL: Dewpoint Meter for N2 Load Lock=Yes
RCU Duct Length FNC - RCU: NA
Ionizer (maker/model): None
Chemical PreFilter-Acid: Chemical Pre-filter (for Acid)=None
Chemical PreFilter-Alkali: Chemical Pre-filter (for Alkali)=None
Chemical PreFilter-Hydrocarb: Chemical Pre-filter (for Hydrocarbon)=None
Chemical PreFilter-Location: Chemical Pre-filter Location=N/A
Side FFU Chemical Filter: Side FFU Chemical Filter=None
O2 Control for N2 LL: O2 Density control for N2 Load Lock=Yes
System, Wafer/Carrier Handling
Carrier Type: FOUP/25slots, SEMI STD
FOUP Maker/Model: FOUP Maker/Model= Entegris/F300-2005-17UT1502
Carrier Stage Capacity: 32 FOUP
Info Pad A,B: None
Fork Material: END EFFECTOR242*2 CERMATIC
W/T Type: Gemark WHR
W/T Type A/T: Standard
System, Power Distribution
Voltage 3phase: 480VAC
3phase connection type: Star Connection
Voltage Single-phase: 120VAC
Single-phase connection type: N/A
Wattmeter: None
Control Power UPS provided by: Customer
Control Power UPS type: N/A
UPS Input/Output Voltage: N/A
System, Gas Distribution
IGS Type: Integrated Gas System
IGS Maker: Fujikin
Tubing Bends: Bend Less than 90deg
IGS Final Filter: PALL
IGS Regulator: Tescom
IGS MFC: HORIBA STEC-Z500series/ Digital
IGS Press. Transducer: Celerity
Liquid Source Vapor System: Liquid Source Vapor System Maker/Type=None
Gas Leak Detector: None
Gas Leak Detector Provided By: Customer
Gas Leak Detector Maker: Customer - House System
Gas Detector Power: Customers Facility Provided
Detected Gas 1 / Location: H2/Gas cabinet
External Torch Unit: Installed
Burn Out Unit: N/A
PAC: None
Exhaust Pressure Control: N/A
Exhaust Pressure Controller: N/A
Vacuum Exhaust System: N/A
Vacuum Pressure Controller: N/A
Heater Tape Interface: Heater Tape Interface
System, Reactor
Quartz Provided by: ASM
Quartz Vendor Requirement: None
SiC Provided by: N/A
SiC Vendor Requirement: N/A
Liner Tube (AP): N/A
Process Tube (AP, AP+Sub-AP): Quartz Single
Outer/Inner Tube Material: N/A
Inner Tube Type (LP): N/A
Inner T/C: Process Tube interior wall type (for AP Heater)
Tube Sealing: N2 purge+Lip seal
Manifold Heater: N/A
Valve,Manifold PCW: N/A
Soft Backfill Injector: N/A
Boat Type: 170 slots Ladder (5.3mm Pitch)
Boat Material: Quartz
Boat Rotation: Yes
Pedestal Type: Quartz
Cap Heater: None
Auto Shutter: No Storage Purge Type
Earthquake Countermeasure: None
Process Cap: Process Cap
System, Facilities
Exhaust Connection Point: Top Connection
PCW Connection Point: Bottom Connection
Incoming Gas Connection Point: Bottom Connection
Gas VENT Connection Point: Bottom Connection
Exhaust VENT Connection Point: Bottom Connection
Gas Unit Exh Connection Point: Bottom Connection
Power Cable Input Location: Power Box Top
Gas Exhaust Connection Point: Top Connection
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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