Equipment details:

Date of Manufacture: 2007-01-05

Currently Configured for: 300mm

Current Equipment Status: Incoming

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Tool is in service in a clean room.

From original tool PO, please inspect to verify

3-1 Furnace Unit
1. Cartridge Heater D4EX28804 1
2. T/C for Heater Control D4EX24431 5
3. T/C for Over temperature Protection D4EX15442 5
4. L type T/C for Cascade Control D4EX26037 1
5. 5Point T/C for Profile Control D4EX26038 1 OPTION
6. 1Point T/C for Profile Control D4EX29533 1 OPTION
7. Thyristor Unit for Control SKKT106L5Z2WHDK 1 Water cooling type


3-2 Clean Unit
1. Clean Module Unit BV-R15TU1G7N 1 Wafer transfer area (Z axis side)
2. Clean Module Unit FU37050KE 1 Rotation cassette Storage (Upper)
3. Clean Module Unit FU37096KE 1 Rotation cassette Storage (Lower)
4. Chemical Filter CBM3-C-1099600CF068 1 for wafer transfer area
5. Chemical Filter F-6000-053-0001 1 Intake for wafer transfer area

3-3 Controllers
1. Main / Operation Controller D4EX32643 (CX5000)
2. Operation Controller UT3-15BX2RD
3. Sub. Operation Unit D4EX32645 (WEBLIGHTFX)
4. Process Module Controller: D4EX30530 (PMC5000_
5. DDC Temperature Controller D4EX33541 (CQ1710) CPU Unit D4EX33540 (CQ1710) TC Unit
6. Gate Drive Unit D4EX18024
7. MFC / Pressure Controller D4EX30617
8. FOUP Loader COntroller  Unit D4EX30802 (Robo5000)
9. Wafer Handling Controller Unit: D4EX30803(Robo5000)
10. Valve / Interlock Control Unit cJ1G Made By OMRON
11. Switching HUB D4EX32646 (FS909S)
12. Signal Tower (Front) WEP-402-RCGB 1 Red, White, Green, Blue
13. Signal Tower (Rear) MES-402A-RCGB 1 Red, White, Green, Blue
14. Gas Pattern Panel D4EX34455 1, Rear


3-4 Drive Mechanisms
1. I/O Shutter ----- 1
2. AGV/PGV Stage ----- 1
3. FOUP Loader ----- 1
4. Rotation FOUP Storage ----- 1 FOUP receipt number : 16
5. FOUP Opener ----- 1
6. Wafer Detection ----- 1 25 in one lot.
7. Wafer Transfer ----- 1 Lift Transfer
8. Variable Pitch Wafer Converter ----- 1
9. Boat Elevator ----- 1
10. Boat Rotation ----- 1 OPTION
11. Notch Aligner ----- 1 OPTION


3-6 Gas System
1. Gas Unit ----- 1 N2, SiH4, 1%PH3/Ar O2, ClF3 

3-7 Exhaust System
?. Dry Pump/Booster ME40K-EY013A (KASHIYAMA)
2. Diaphragm Sensor (1000 Torr) 623A13TBE 1 Made by MKS
3. Diaphragm Sensor (10 Torr) 626A11TBE 1 Made by MKS
4. Differential Diaphragm Sensor (100 Torr) 223BD-00100 1 Made by MKS
5. Pirani Sensor PSG050 (Sensor) 1 Made by INFICON PSG051 (Sensor) 2 Made by INFICON VGC-012 (Controller) 2 Made by INFICON
6. APC Valve VEC-S8-X0301 1 Made by CKD
7. APC Controller VEC-CA8-X0301 1 Made by CKD
8. Exhaust Piping ----- 1
9. Exhaust Dilution Line ----- 1
10. Reactor Tube Press Leak Line ----- 1
11. ATM Sensor PA830-102G-VCR 2 Made by Copal
12. ATM Gauge PZ200 2 Made by Copal
13. ATM Sensor (Double O-ring) PA830-102V-VCR 1 Made by Copal
14. ATM Gauge (Double O-ring) PZ200 1 Made by Copal

3-8 Safety
1. Water leak detector (Detector) K7L-AT50 2 Made by OMRON
2. Water leak detector (Sensor) F03-16PE 3 Made by OMRON
3. O2 Detector DTF-201 1 Made by Enegy Support
4. Smoke Detector (Reception) CPC-2 1 Made by Nittan
5. Smoke Detector OIB 2 Made by Nittan
6


3-9 Special specification
3-9-1 Furnace
1. Bar Code Reader (Sensor) BL-601HASO(7099) 2 Made by KEYENCE
2. Bar Code Reader (Power) BL-U2 2 Made by KEYENCE

3-9-2 Other
1. Pressure Sensor E8Y-AR2Y-5 5 Made by OMRON
2. Gas Pressure Sensor HYPSMV-ND420 (MPA) 6 Made by TEMTECH
3. Cooling Water Flux Meter KSL-5L-24V 4 Made by REGAL JOINT
4. Cooling Water Pressure Gauge PA-858-103G-R2 1 Made by COPAL
5. Cooling Water Flux Meter KSL-30L-24V 1 Made by REGAL JOINT
6. MFC zero adjustment function 1 Made by STEC

3-9-3 Load Lock Chamber
1. Furnace port ----- 1
2. Load Lock Chamber ----- 1
3. Gas Inlet ----- 1
4. Door Valve ----- 1
5. Furnace Port Gate Valve ----- 1
6. Gas Control For N2 Purge ----- 1
7. Exhaust Piping ----- 1
8. Water Colling N2 Puurge Line ----1
9. Auto Pressure Control Line ---- 1
10. Mass Flow Controller For N2 Parge FC-782-N2-200SLM-P28061 2 Made by AEJ

Tool Damage/Missing Parts: 
Please inspect tool to reconfirm
Dry pumps not included