Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)

Lam Research EOS - Parts

Asset ID: 210858

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Lam Research

EOS - Parts

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Boise, United States

Available date: Currently Available

LAM EOS Robot handling parts


LAM Part No.          Material Description                                           Qty    Condition                                                                  Mfg'r     Model


853-135821-302     ASSY,END EFFECTOR,UPPER,1-BLADE,EFEM,CF      1       Used – Tabs slightly worn but have long life still      LAM        EOS

853-131359-302     ASSY,END EFFECTOR,LOWER,4-BLADE,EFEM,CF     1       Used – Tabs slightly worn but have long life still      LAM        EOS

853-167587-402     ASSY,END EFFECTOR,FLIP,BS BVL                             4        Used – Tabs slightly worn but have long life still      LAM      EOS

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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