Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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PVD (Physical Vapor Deposition)
Date of Manufacture: 2010-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: ENDURA2
Controller: GEN2
Software Version: eentB5.0_140
System Power Rating: 208V AC 3-Phase +480V AC Noraml
Loading Configuration: 3 load ports
Chm/Unit Position 1: EXTENSA TTN; Gas: Ar/N2
Chm/Unit Position 2: EXTENSA TTN; Gas: Ar/N2
Chm/Unit Position 4: EXTENSA TTN; Gas: Ar/N2
Chm/Unit Position C: RPC Gas: Ar/H2/He
Chm/Unit Position D: RPC Gas: Ar/H2/He
Chm/Unit Position E: DMD Degas; Gas: Ar
Chm/Unit Position F: DMD Degas; Gas: Ar
DEGAS Chamber
Chamber Position: E,F
Process Type: DMD
RPC Chamber
Chamber Position: C,D
Process Type: PCxT
Shutter Option: no
Slit Valve Seal (bonded or o-ring): Bonded
Kit, BEOL, PCxT-PRECLEAN Kit (CH C): See Below
PEDESTAL, TITANIUM 300MM PCII - REPAIR: 0020-19258
BELLJAR, 21 OD 300MM PC XT/XTE - REPAIR: 0040-55456
SHIELD, LOWER ALUMINUM 3-STRAP - REPAIR: 0040-86514
SHIELD, INNER 300MM PCXT/RPC - REPAIR: 0021-19342
INSULATOR, PEDESTAL QTZ 300MM PCII - REP: 0200-01903
SEAL, RF SPRING: 0015-01573
Clean Vendor: SHT/KTT
Shutter Part No.: NA
RF Power Supply: COMDEL CDX-2000 Dual RF Generator：AMAT P/N：0190-40655
Chamber Position: 1,2,4
Process Type: EXTENSA TTN
Current Target Material: Ti
Shutter Option: Yes
Chamber Body: Hybrid
Chamber Body p/n: 0040-76824
Slit Valve Seal (bonded or o-ring): Bonded
Magnet Type: LDR Adv TTN
Magnet Part No.: 0010-45647, 0010-45645
Magnet Serial No./ Manf. Date: no need
AMAT Target Part No.: 0190-01284
Target Vendor: NIKKO
Target Part No.: 0190-01284
Exensa TTN (CH 3) KIT, AMAT ENDURA2-EXTENSA TTN – REP : See Below
Shutter Part No.: 0021-26896
Pedestal Type: DTESC
Pedestal Part No.: 0010-42030
Cryo Restrictor: Yes
Cryo Restrictor Part No.: -
E-Magnet powersupply: P/N:0195-10842
Cathode Master P/S: AE MDX PINNACLE P/N：0190-25689
Cathode Slave P/S: AE MDX PINNACLE P/N：0190-25689
Total Cathode Power: 40 kw
RF Bias P/S: ENI GHW-12Z：0190-25529
RF Bias Generator: 1250w 13.56 MHz
Process Type: COOL
Chamber position: A,B
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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