Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
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Centura AP AdvantEdge G5 Mesa Poly
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2011-05-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1200592
Micron MISTI/LID #: ACAML3F300
Vendor Tool Serial #: 423089
Any defective or missing parts: Yes
Any modification/conversion/refrofit was perform to the tool? Yes
OEM: AMAT
Tool Model: CENMESA
Software Version (include revision #): B3.5_105
System Power Rating: 208 AC 3-Phase
Loading Configuration: 3 LOADPORT
Retrofit Part Type 1: Loadlock door assembly
Retrofit Part Description 1: new design no clamp type
Retrofit Part Number 1: 810-122123
Chamber Name 1: A
Chamber Name 2: B
Chamber Name 3: C
Chamber Name 4: D
Chamber 1 Description: MESA
Chamber 2 Description: MESA
Chamber 3 Description: ASHER
Chamber 4 Description: AXIOM
Chamber 1 Chemicals Gases Used: BCL3,CL2_50,CL2_400,NF3,CH2F2,HBR,O2_100,O2_20,N2,CF4,HE,CHF3,SF6,AR
Chamber 2 Chemicals Gases Used: BCL3,CL2_50,CL2_400,NF3,CH2F2,HBR,O2_100,O2_20,N2,CF4,HE,CHF3,SF6,AR
Chamber 3 Chemicals Gases Used: O2,CF4,N2
Chamber 4 Chemicals Gases Used: O2,H2_N2,N2
OEM Cable 1: Roughing Pump Cable
OEM Cable 2: Heat Exchanger Cable
OEM Cable 3: Heat Exchanger Hose
OEM Cable Length 1: 22860
OEM Cable Length 2: 22860
OEM Cable Length 3: 22860
N2 Load Port Exists 1 No
N2 OEM Stage Available 1: Yes
N2 Load Port Exists 2: No
N2 OEM Stage Available 2: Yes
N2 OEM Stage Available 3: Yes
Optional Gas 1: NA
Custom Gas Lines 1: NA
Gas TOR 1: NA
Damage/Missing parts list
Chamber A- Damage- LID/outer/iner temp fault -999 (temp controller)
Chamber B- Damage- LID/outer/iner temp fault -999 (temp controller)
Chamber B- Missing- TGV controller
Chamber C- Missing- Microwave Assembly (Magnetron head)
Chamber C- Missing- UV lamp
Chamber C- Missing- Chamber Control Unit (CCM)
Chamber C- Missing- Microwave Power Supply
Chamber C- Missing- Temperature Control Unit
Chamber C- Missing- DC Power Supply
Chamber C- Missing- Vapor on Demand Module (VoDM)
Chamber C- Missing- Pedestal
Chamber C- Missing- Wafer Lift Pneumatic Actuator Assembly
Chamber C- Missing- Wafer Lift Pins
Chamber C- Missing- 10 Torr Manometer
Chamber C- Missing-100 Torr Manometer
Chamber D- Missing- Source Gen.
Chamber D- Missing- Chamber Control Unit (CCM)
Chamber D- Missing- Wafer Lift Pins
Chamber D- Missing- 10 Torr Manometer
Chamber D- Missing- 100 Torr Manometer
Chamber D- Missing- Gas line (Gen to chamber 0010-24302)
Chamber D- Missing- Vapor on Demand Module (VoDM)
Chamber D- Missing- Pedestal
Chamber D- Missing- Wafer Lift Pneumatic Actuator Assembly
Missing- Eye-D computer
Missing-computer
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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