Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Novellus Systems Inc. VECTOR SOLA UV Cure

Asset ID: 18842

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Novellus Systems Inc.

VECTOR SOLA UV Cure

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

The power supply*8 and Heater are missing.

The Front-End Interface is 2LPS.

Factory Automation is OHT.

Robot Type is ATR8.

Facilities Configuration is bottom.

Primary User Interface Loc. is left.

The Spindle and LL Pedestal are Pneumatic.

The Pedestal Type and Gate Valve Type is Standard.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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