Macquarie Semiconductor and Technology on behalf of Intel Ireland Ltd.
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AMAT / Varian Semiconductor Equipment Associates (VSEA)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Leixlip, Ireland
Available date: Currently Available
· UES buffer
· Front and Remote UI
· Loader module transfer robot and controller with 4 load ports.
· IHC Source
· Plasma Flood Gun
· 2 Load locks
· Chamber liners
· Beam line graphites
· Wafer Orienter
· Process Chamber
· Multipixel profiler
· Wafer view monitor
· Beamline and source turbo pumps, Pfeiffer
· End station turbo pump
· Remote chiller and harness
· Expanded exhausted gas box with 9 stick capability
· 8 gas sticks for varied species
· Roplat with CompIII Electrostatic Chuck
· Terminal Differential Vacuum Pump Option
· Bottom access facilities
· Additional details available upon request
NOTE: Tool configuration shown is accurate to the knowledge of Intel Resale Corporation. Actual configuration may vary. All sales are “as is” and buyer is advised to conduct its own inspections. Other names and brands may be claimed as the property of others.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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