Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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ECD (Electro Chemical Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Chandler, United States
Available date: Currently Available
Module | Details |
Fixloader | Brooks Version 6 |
Control PC’s | 2 proteus PC’s,Chase & main |
FFU | SABRE FFU and SABRE ANL FFU |
Front End Robot | Brooks ATR8+, Vortex |
Back End Robot | Vortex Max |
Anneal Chambers | 5 chambers Gas Box Hot Plate Cold Plate Carrier arm (Forkcarrier) |
Aligner Station | Aligner |
Transfer Station | Transfer Station |
Plating Cell | VAN assy on Sabre Extreme plating cell |
Anode chamber | High-Acid anode chamber Charge plate |
Membrane | High-Acid membrane |
Diffuser | High-Acid diffuser |
Insert | Insert is in cell, mountedabove HRVA |
Clamshell | Vacuum/pressure clamshell Optical open sensor Vacuum close sensor |
Cone | 2 wiper sealsfor use withvacuum/ pressure drive Cone pusher assy backside O-ring |
Cylinder | Large shaft cylinder |
Cup | Cup assembly |
Lift Controller | Sel G liftcontroller |
AAE | AAE assy’s - Cel1,Cell 2/3 Robot Motor Controller Bearings |
IDEC Box | No smart relaybox. Vacuum levelclose sensor used |
PEM | O-ring stylePEM chuck EBR arm nozzle PEM controllers PEM motorspindles |
Dosing system | Dosing systemhardware and controls; Dosing control Dosing system PNL NOWPAK Dosing systemkit |
CDM Module | CDM module, Syringe controllers. Flow switches &Valves; Chem Dilution Mod Assy CDM module plumbing kit CDM sensor kit |
Bath Module | PS Reservoir Assy Ultrasonic Level Sensor PVDF HeatExchanger/ Dual PVDF Heat Exchangers for newer toolsor upgrades |
Plating Pumps | Plating pump Flow meters |
Invertor | Frequency invertor used where applicable |
Aspirator Pump | Diaphragm pump |
Heater/ Chiller | HX300, TF10000 |
SIOCs | SIOC’s; Wafer Wand Bath Plating Post-plating Anneal |
Controllers | 1x System controller 2x Module controllers |
E -Net | 2 E-net hubs and cablingsetup |
CCB | PULST Plating assy |
AE PPS | Power supply:E-Wave I or E-Wave II |
NOTE: Tool configuration shown is accurate to the knowledge of Intel Resale Corporation. Actual configuration may vary. All sales are “as is” and buyer is advised to conduct its own inspections. Other names and brands may be claimed as the property of others
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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