Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2021-11-09
Currently Configured for: 300mm
Current Equipment Status: Incoming
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
MiCAP Number: 1521228
Micron MISTI/LID #: MHXTK6SU00
Vendor Tool Serial #: MT801-3
Any modification/ conversion/ refrofit was perform to the tool? No
Any defective or missing parts: No
OEM: MTSN
Tool Model: HYDRXT
Software Version (include revision #): 2.0b16
System Power Rating: 200 AC 3-Phase
Loading Configuration: 3 load ports
Tool under OEM service contract? Yes
Retrofit Part Type 1: Center RF Matcher
Retrofit Part Description 1: Flipping Fan of Center RF Match
Retrofit Part Number 1: NA
Retrofit Date of Change 1: 2024-06-02T15:00:00Z
Retrofit Qty 1: 8
Retrofit Remark 1: F15 Special Flipping fan of Center RF Match
Chamber Name 1: L1
Chamber Name 2: L2
Chamber Name 3: R1
Chamber Name 4: R2
Chamber 1 Description: XT
Chamber 2 Description: XT
Chamber 3 Description: XT
Chamber 4 Description: XT
Chamber 1 Chemicals Gases Used: He, O2, N2, Ar, CHF3, NF3, CF4, CH2F2, SF6, H2, CO, C4F8
Chamber 2 Chemicals Gases Used: He, O2, N2, Ar, CHF3, NF3, CF4, CH2F2, SF6, H2, CO, C4F8
Chamber 3 Chemicals Gases Used: He, O2, N2, Ar, CHF3, NF3, CF4, CH2F2, SF6, H2, CO, C4F8
Chamber 4 Chemicals Gases Used: He, O2, N2, Ar, CHF3, NF3, CF4, CH2F2, SF6, H2, CO, C4F8
OEM Cable 1: Remote PDU
OEM Cable 2: UPI
OEM Cable Length 1: 15000
OEM Cable Length 2: 15000
N2 Load Port Exists 1: Yes
N2 Load port Vendor 1: Santa Phoenix
N2 OEM Stage Available 1: No
N2 Load Port Exists 2: Yes
N2 Load port Vendor 2: Santa Phoenix
N2 OEM Stage Available 2: No
N2 Load Port Exists 3: Yes
N2 Load port Vendor 3: Santa Phoenix
N2 OEM Stage Available 3: No
Custom Gas Lines 1: He 500sccm STEC MFC
Custom Gas Lines 2: O2 2000sccm STEC MFC
Custom Gas Lines 3: O2 100sccm STEC MFC
Custom Gas Lines 4: N2 500sccm STEC MFC
Custom Gas Lines 5: Ar 2500sccm STEC MFC
Custom Gas Lines 6: CHF3 1000sccm STEC MFC
Custom Gas Lines 7: NF3 500sccm STEC MFC
Custom Gas Lines 8: CF4 1200sccm STEC MFC
Custom Gas Lines 9: CH2F2 600sccm STEC MFC
Custom Gas Lines 10: SF6 450sccm STEC MFC
Custom Gas Lines 11: H2 500sccm STEC MFC
Custom Gas Lines 12: CO 1000sccm STEC MFC
Custom Gas Lines 13: blanket
Custom Gas Lines 14: C4F8 500sccm STEC MFC
Gas TOR 1: He 500sccm
Gas TOR 2: O2 2000sccm
Gas TOR 3: O2 100sccm
Gas TOR 4: N2 500sccm
Gas TOR 5: Ar 2500sccm
Gas TOR 6: CHF3 1000sccm
Gas TOR 7: NF3 500sccm
Gas TOR 8: CF4 1200sccm
Gas TOR 9: CH2F2 600sccm
Gas TOR 10: SF6 450sccm
Gas TOR 11: H2 500sccm
Gas TOR 12: CO 1000sccm
Gas TOR 13: NA
Gas TOR 14: C4F8 500sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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