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LAM Research Alliance (A6) Exelan HP - Spare Parts


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Asset ID: 210876

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LAM Research

Alliance (A6) Exelan HP - Spare Parts

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: San Jose, United States

Available date: TBD

200mm Spare Parts including process kits from A6 Exelan HP

Process Kits

715-443130-001: Qty 3 Rev C, Qty 1 Rev B (Anodized Aluminum)

715-443129-001: Qty 4 (Ceramic)

922-00753: Qty 4 (Quartz)

716-443084-003: Qty 4 (Quartz)

Installation Screws: x12 + x16


853-0324220-020 Rev A: Qty 3

853-0324220-050 Rev A

853-495578-030 Rev A: Qty 2

853-495578-050 Rev A: Qty 2

853-495594-030 Rev B: Qty 2

853-495594-050 Rev B: Qty 2

853-495595-030 Rev D: Qty 2

853-495595-050 Rev C: Qty 2

853-494678-010 Rev B

853-494678-010 Rev C

853-494678-020 Rev C

833-491108-002/B Ethernet Interconnect Cable

001-1865-01 Rev C Serial Cable

853-492633-001 Rev A VME Ethernet Cable

Envision Computer

HP xw4400 Workstation

Logitech Marble Mouse USB Trackball

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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