Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Rio Rancho, United States
Available date: Currently Available
General:
· Block 1: Carrier w/ Wafer Transfer Arm
· Block 2: Process w/ Wafer Transfer Arm
· Block 3: Stepper Interface Main (Dummy)
· AC Power Box
o With Noise filter: CE Mark Type
o 208volt, 3-phase, star, 50/60Hz compatible
· Carrier Block (CSB)
· (4) FOUP Loadports
· Carrier RFID capability
· CSB Pressure Sensor
· Process Block
· Coater (COT) Qty=4
o (8) 1.2mm BARC nozzles with Temp control per Coater
o Dual Bottle Supply for R1-R8, 4 COT supply for R7,R8
o (1) RRC nozzles with separate Pump Chemical Supply System
o E-Bath (Nozzle Bath for each COT cup)
o 6ml Tube phram pumps
o 4L or 1L Nowpak bottle insert
o EBR angle adjustment capability
o Bulk-FSI system for solvent dispense
o Exhaust Pressure Control (EPC) per coater module inside track
o Exhaust duct and drain case cleaning function
o Multi-Rapid Thermo Controller System
o PP Molded Cups
· Adhesion Processing Station (ADH) Qty=4
o Wafer Wedging function using Plate Temperature sensor SW
· Chill Plate Process Station (CPL) Qty=7
o Wafer wedging function using optical detection sensor
· Transfer Chill Plate (WCPL) Qty=1
· Precision Chilling Hot Plate Station (CPHG) Qty=6
o Wafer Wedging function using Plate Temperature sensor SW
· Interface Block (Dummy) Qty=1
· TEL Temp and Humidity Controller Qty=1
o (1) Shinwa unit for system COT,Dev T/H control
· Chemical Cabinets Qty=1
o (1) HMDS Canister
o (2) solvent auto supply with 2-Pump Solvent chemical supply system
o (1) Sub operation panel
o Top side facility connection
· (1) AC Power Box
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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