Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Metal CVD (Chemical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
11-3TEL_TRIASPL_W_04 with Configuration Type:MT
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1321369
Micron MISTI/LID #: TUTRB7T100
Vendor Tool Serial #: C10413
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: TEL
Tool Model: TRIAS
Software Version (include revision #): V3.7
System Power Rating: 208AC 3-Phase
Loading Configuration: 3 load port
Retrofit Part Type 1: NA
Chamber Name 1: 1
Chamber Name 2: 2
Chamber Name 3: 3
Chamber Name 4: 4
Chamber 1 Description: W
Chamber 2 Description: W
Chamber 3 Description: W
Chamber 4 Description: W
Chamber 1 Chemicals Gases Used: WF6 / ClF3 / Ar / SiH4 / H2 /N2
Chamber 2 Chemicals Gases Used: WF6 / ClF3 / Ar / SiH4 / H2 /N2
Chamber 3 Chemicals Gases Used: WF6 / ClF3 / Ar / SiH4 / H2 /N2
Chamber 4 Chemicals Gases Used: WF6 / ClF3 / Ar / SiH4 / H2 /N2
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
N2 Load Port Exists 3: No
Optional Gas 1: Gas1
Optional Gas 2: Gas2
Optional Gas 3: Gas3
Optional Gas 4: Gas4
Optional Gas 5: Gas5
Optional Gas 6: Gas6
Optional Gas 7: Gas7
Optional Gas 8: Gas8
Custom Gas Lines 1: WF6 , 450 sccm
Custom Gas Lines 2: ClF3 , 1000 sccm
Custom Gas Lines 3: Ar , 7000 sccm
Custom Gas Lines 4: SiH4 , 800 sccm
Custom Gas Lines 5: H2 , 6000 sccm
Custom Gas Lines 6: N2 , 2000 sccm
Custom Gas Lines 7: BSAr , 7000 sccm
Custom Gas Lines 8: H2 , 3000 sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
