Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Metal CVD (Chemical Vapor Deposition)
Date of Manufacture: 2017-10-27
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
OEM: TEL
Tool Model: TRIAS E+
Software Version (include revision #): V5.761
System Power Rating: 208AC 3-Phase
Loading Configuration: 3 load port
Chamber Name 1: PM1
Chamber Name 2: PM2
Chamber Name 3: PM3
Chamber Name 4: PM4
Chamber 1 Description: HTTIN
Chamber 2 Description: HTTIN
Chamber 3 Description: HTTIN
Chamber 4 Description: HTTIN
Chamber 1 Chemicals Gases Used: N2, TiCl4, NH3, ClF3
Chamber 2 Chemicals Gases Used: N2, TiCl4, NH3, ClF3
Chamber 3 Chemicals Gases Used: N2, TiCl4, NH3, ClF3
Chamber 4 Chemicals Gases Used: N2, TiCl4, NH3, ClF3
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
N2 Load Port Exists 3: No
Optional Gas 1: HTTIN-Gas1
Optional Gas 2: HTTIN-Gas2
Optional Gas 3: HTTIN-Gas3
Optional Gas 4: HTTIN-Gas4
Optional Gas 5: HTTIN-Gas5
Optional Gas 6: HTTIN-Gas6
Optional Gas 7: HTTIN-Gas7
Optional Gas 8: HTTIN-Gas8
Optional Gas 9: HTTIN-Gas9
Optional Gas 10: HTTIN-Gas10
Optional Gas 11: HTTIN-Gas11
Optional Gas 12: HTTIN-Gas12
Optional Gas 13: HTTIN-Gas13
Custom Gas Lines 1: N2, 5000sccm
Custom Gas Lines 2: N2 , 10000sccm
Custom Gas Lines 3: N2 , 10000sccm
Custom Gas Lines 4: N2 , 2000sccm
Custom Gas Lines 6: N2, 300sccm
Custom Gas Lines 7: TiCl4 , 300sccm
Custom Gas Lines 10: NH3 , 10000sccm
Custom Gas Lines 11: NH3 , 2000sccm
Custom Gas Lines 12: ClF3 , 500sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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