Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

Tokyo Electron Ltd. (TEL) Triase+ Ti/TiN


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Asset ID: 10926

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Tokyo Electron Ltd. (TEL)

Triase+ Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2014-01-02

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do, Korea, Republic of

Available date: Currently Available

  1. Main System
    1. 1* TRIASe+ Platform
      1. Load Port*3 (12" wafer)
      2. Loader Module
      3. Lord Lock Module with Cooling*3
      4. Power Distribution Unit
      5. Trias Software
      6. PF S2-0200 Safety
    2. 2* Ti Process Module
      1. PCOT Ti Chamber
      2. Gas Box
      3. RF Generation Unit
      4. Milaebo Trap Interface
      5. Milaebo Trap Software
    3. 2* TiN Process Module
      1. PCOT TiN Chamber
      2. Gas Box
      3. Korea Trap Interface
      4. Korea Trap Software
  2. Accessory Parts
    1. 1* PF Accessory
      1. Special Load Port
      2. UI Fixing at LM Right Side
      3. EFEM & FAN Check Monitor
      4. TM, LLM Leak Check Port Manual Valve Transfer Navigation System
      5. PF Outer Cable
      6. Edge Grip Blade
      7. LM Fluorescent Light
      8. TM RGA PORT (w/o Manual Valve)
    2. 2* Ti PM Accessory
      1. Ti Leak Check Port
      2. Ti PM Outer Cable
      3. Ti Gas Box ClF3, H2, NH3 LINE
    3. 2* TiN PM Accessory
      1. TiN Leak Check Port
      2. TiN High Coverage Process Kit
      3. TiN PM Outer Cable
    4. Utility Accessory
      1. Utility Interconnection Gas Female
      2. FDC
      3. Signal Tower
      4. CVCF Special Correspondence
      5. Rear Step
      6. Cable Tray
    5. Safety
      1. PF, PM S2-0200
      2. Korean & English Safety Label for PF and PM
    6. Software & AGV
      1. Standard GEM,GJG
      2. On Line
      3. OHT&AGV I/O Monitor Correspondence Omron Carrier ID Reader Correspondence Wafer Log
      4. Wafer ID, PPID, PRJOBID

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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