Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
Varian Semiconductor Equipment Associates (VSEA)
Date of Manufacture: 2005
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
| Software Version | VCS 7.67 | |||||||
| System Power Rating | 208 VAC | |||||||
| Loading Configuration | 4 Loadport | |||||||
|
Gases
Used | ||||||||
| Ar | ||||||||
| BF3 | ||||||||
| AsH3 | ||||||||
| PH3 | ||||||||
|
Module | Common/Area Specific | Component | Sub-component | Checkpoint | Spec | Power up | Result | Judgement |
| (Y/N) | ||||||||
| Frontend interface | Common | Load Port | Stage | Particle, rusting parts | No visual particle & rusty parts | Y | Fixload 6M | OK |
| Barcode reader | Particle, rusting, motion | No visual particle & rusty parts | Y | OK | ||||
| Door | Particle, rusting, motion | No visual particle & rusty parts | Y | OK | ||||
| Common | FI Robot | Blade | Cracking | No damage | Y | Brooks DBM | OK | |
| End effector | Wearing | No damage | Y | OK | ||||
| Bolts | Rusting | No rusty | Y | OK | ||||
| Robot | Motion | No alarm when tool execute initial | Y | OK | ||||
| Load Lock | IMP Specific | Door | O-ring | Visually check not cracking and corrosion | surface no damage | Y | OK | |
| IMP Specific | Elevator | Drive Shaft | Visually check not cracking and rusting | Visually check not cracking and rusting | Y | OK | ||
| IMP Specific | lead screw | Visually check not cracking and rusting | Visually check not cracking and rusting | Y | OK | |||
| IMP Specific | Cassette Platform | Cassette Sense cable | Visually check not cracking | Cable condition (破皮) | Y | OK | ||
| Process Chamber | IMP Specific | Air Bearing | Air Bearing shaft | Visually check not cracking and rusting | Function | Y | OK | |
| Vacuum burst | Cycle test and check IG3 burst within 5e-7 | Pressure gap < 5e-7 torr when Air bearing function work | Y | OK | ||||
| PFG | PFG | water cooling quick connector not leak | No leakage | Y | OK | |||
| Base Vacuum | IG3 | Shutdown beam within 5e-7 torr | Pressure gap < 5e-7 torr when beam shut down | Y | OK | |||
| Profiler | shaft | Visually check not cracking and corrosion | Visually check not cracking and corrosion | Y | OK | |||
| Vacuum burst | Cycle test and check IG3 burst within 5e-7 | Cycle test and check IG3 burst within 5e-7 | Y | OK | ||||
| Incident Angle Cup | water tube | No leak | Check dose cup cable condition | Y | OK | |||
| Siginal cable | Visually check not cracking and corrosion | Check dose cup cable condition | Y | OK | ||||
| Source Subsystem | IMP Specific | Gas Box | Gas sticks | Visually check not cracking and corrosion | Y | Ar, BF3, AsH3, PH3 | OK | |
| IMP Specific | Bottle clamper | Visually check not cracking and shortage | Y | OK | ||||
| IMP Specific | Exhaust hose tube | Visually check not cracking | Check door interlock | Y | OK | |||
| IMP Specific | Manipulator | Assembly | Visually check not cracking and shortage | Y | ||||
| IMP Specific | Source cover | Visually check not cracking and shortage | Y | OK | ||||
| IMP Specific | Safety switch, not bypasee and push | Y | OK | |||||
| with dscouraged | ||||||||
| IMP Specific | Filement | Cables condition | Connector & cable not cracking | Y | OK | |||
| IMP Specific | Resolving Aperture | Assembly | Visually check not cracking and shortage | Y | OK | |||
| IMP Specific | Setup Cup | Assembly | Visually check not cracking and shortage | Y | OK | |||
| IMP Specific | Vacuum(IG2) | in & out vacuum no change | IG2 vacuum < 5e-7 | Y | OK | |||
| IMP Specific | Q2 & Q3 | Assembly | Visually check not cracking and shortage | Y | OK | |||
| IMP Specific | quick connecor | No water leak | Y | OK | ||||
| IMP Specific | interlock Switch | Visually check not cracking and shortage | Y | OK | ||||
| Support Subsystem | IMP Specific | Control Subsystem | lightlink comnination | all loop need get 1st priority loop | Y | OK | ||
| IMP Specific | KVM switch function | make sure IAN & NCS can switch | Y | oK | ||||
| IMP Specific | Remote Chiller | Not water leak | Visually check Water tray | Y | OK | |||
| IMP Specific | Tempture control | Manual set to15 ֯C | Confirm chiller cool down to 15 degree | Y | OK | |||
| IMP Specific | Cryo Pumps | pump | not noise when running | Y | OBIS 320 FE | OK | ||
| IMP Specific | compressor | hilum presure | Y | IS-1000 | OK | |||
| IMP Specific | Not water leak | Y | OK | |||||
| IMP Specific | Roughing Pump | pump | Not water leak | Y | Was originally Ebara A10S, Not included | OK | ||
| IMP Specific | enclosure | Doors & panels | Function normal no cracking & rusting | Y | OK | |||
| IMP Specific | HV light(if have) | Function normal | Y | |||||
| IMP Specific | Component | no shortage parts | Y | OK | ||||
| IMP Specific | Ground handle Bar | no shortage parts | Y | OK | ||||
| IMP Specific | Gas Box Ground shouting Bars | Visually check not cracking | Y | OK | ||||
| IMP Specific | 90 Ground shouting Bars | Visually check not cracking | Y | OK | ||||
| IMP Specific | 70 Ground shouting Bars | Visually check not cracking | Y | OK | ||||
| IMP Specific | 70/90 Shorting bars | Visually check not cracking | Y | OK | ||||
| IMP Specific | D2S Shorting Bar | Visually check not cracking | Y | OK | ||||
| IMP Specific | Isolation feet(gas box.70.90) | Visually check not cracking | Y | OK | ||||
| IMP Specific | Water system | Pump | not leak | Y | OK | |||
| IMP Specific | Filter | not leak | Y | OK | ||||
| IMP Specific | All Zones manifold | not leak | Y | OK | ||||
| IMP Specific | Flow sensor not bypass | check universal setting | Y | OK | ||||
| IMP Specific | Safety | EMO buttons | Visually check not cracking | Y | OK | |||
|
ES137172
Packing List - verified on 1/28/2021 | ||||||||
| Crate #1 90 module with beam line, exhaust line | ||||||||
| Crate #2 Main facility PD | ||||||||
| Crate #3 70 Module | ||||||||
| Crate #4 End Station | ||||||||
| Crate #5 Buffer | ||||||||
| Crate #6 Enclosure Door #3 (Panel, Source Housing) | ||||||||
| Crate #7 Enclosure Door #1 (Side Panel, covers) | ||||||||
| Crate #8 Enclosure Door #2 (Roof Panel, cable tray) | ||||||||
| Crate #9 Main Body Plate #1 | ||||||||
| Crate #10 Main Body Plate #2 Crate #11 Facility Cooling Exhaust | ||||||||
| Crate #12 GasBox | ||||||||
| Crate #13 Chiller, 70 Transformer | ||||||||
| Crate #14 Main Transformer, Helium Line | ||||||||
| Crate #15 Cryo Compressor | ||||||||
| Crate #16 Remote PDU | ||||||||
| Crate #17 Boxes x 7 Crate #18 Facility Cooling Exhaust Dock | ||||||||
| Crate #19 V4 cover, 70 waveguide, scan cover, covers, Profiler | ||||||||
| two additional crates : | ||||||||
| One had six OBIS 320FE cryo pumps | ||||||||
| Second crate had four STP A2203C turbo pumps | ||||||||
| Three cryo pumps and two turbo pumps need to be serparated | ||||||||
| and joined to main tools |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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