Macquarie Semiconductor and Technology on behalf of Inspire Technologies, Inc.

Estek Automation SDN BHD WIS-800D


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Asset ID: 210635

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Estek Automation SDN BHD


Broadband Patterned Wafer Defect Inspection

Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Caldwell, United States

Available date: Currently Available

DOMESTIC SALE: Only offers from US entities will be considered. Seller will not clear the equipment for export or act as Exporter of Record from the United States.

Wafer Inspection System

The Estek WIS 8000/800 is designed to

analyze substrates, films, and oxides.


2 to 8 inch setup

Dark and light (dual) channel system

2 Cassette system


Detection 0.22um on silicon at 95% capture rate

Verified by NIST Standards

2 to 8 inch capable with proper setup

Current configuration is 4 to 8 inch

Dark and light channel system

Dark channel is used for detecting particles and any light scattering defects

Light channel is useful for detecting non-light scattering defects such as

mounds, dimples and non uniformity

Detects specular flaws, including large particles, mounds,

dimples, saw marks, grooves, fractures, slip, epi-spikes,

small particles on large grained surfaces, particles buried in/under a film

Remanufactured System to factory production specifications

NIST Calibration

Automatic cassette-to-cassette robotic wafer transport system

Non-contaminating robotic wafer handling system with sorting capability

Wis-8000 model/ includes two random access stages

Wafers per hour, 120

Configured to run Fluoroware PA-72 Series Cassette

Data printer

Color Monitor to display wafers

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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