Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2007-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: NITR
Tool config is based on original PO, please verify tool details at tool inspection
System, General Specification
Heater element Model: MRL
Process Condition: NIT
Maximum Operating Temperature: 900c
N2 Load Lock: Yes
Wafer Type: 12 Inches
Qty. of Production Wafers: 100 pieces per boat
"Boat Operation: Dual boat,
Dual chamber"
Software Version: 6.8c
System, Furnace
Loading Area Light: White
Force Air Cooiling system: Fast ramp
Side Maintenance: Yes
O2 Density control: 0-100ppm
Furnace Temperature Controller: MTC
System, Wafer/Carrier Handling
Carrier Type: 12" FOUP
Carrier Stage Capacity: 12" FOUP
Robot Type: GenMark
System, Gas Distribution
IGS Maker / Type: Fujikin
IGS MFC Maker / Type: HORIBA
IGS Press Transducer Maker / Type: Mykrolis
System, Exhaust Specification
Vacuum Gage - 2 torr: N/A
Vacuum Gage - 10 torr: MKS
Vacuum Gage - 1000 torr: MKS
Main Valve: MKS
Pump Maker/Model: EDWARDS 1800HTX
Low vacuum valve: MKS
Trap: ASM
Vacuum Pressure Controller: MKS
System, Reactor
Outer/Inner Tube Material (LP): Quartz
Inner Tube Type (LP): Quartz
Inner T/C: TYPE-R LPC /Topco
Boat Materail/Type: SiC
Boat Rotation: Yes
Pedestal Materail/Type: Quartz
Auto Shutter: Yes
System, Power Distribution
Voltage 3phase: 480VAC
Voltage Single-phase: 3
Frequency: 60HZ
System, User Interface
Operation Panel: Screen
Indicator Type: Touch panel
Operation software type: Windows
Gas Leak Detector
Gas Leak Detector Material/Type:
System, Fixture List, Gas
IGS maintenance Fixture
Vacuum Gauge
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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