Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. Trias Ti/TiN

Asset ID: 55301

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Tokyo Electron Ltd.

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 5/21/2021


Insulating films were sublimated and the entire chambers were covered with it. But Fab15 did not get any dust made during the operation, and their productions were not affected at all.


Missing or damaged parts: Not reported.

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