Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC

FSI International Zeta 300 G3


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Asset ID: 209758

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FSI International

Zeta 300 G3

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2006-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

The equipment use of destructive methods to deinstallation the equipment.

Damage/Missing parts list, please inspect tool to reconfirm.

Dry pumps and customer provided items not included on sales.

Inspect to confirm configuration and condition.

The robot is missing and the PC is damaged.

Model:ZETA300 G3

Original Ship Date from FSI 2006/10/12

Date of Last PM 2016/05/12

Off-Line Date is 2017

Electronics Console Type is Short

Directory of System Types

OC:50 wafer at a time

MP:Multi Position

MHS:Material Handling System

Key Common Options

Clean Room Manuals 

Standard Manuals 

Chemical Canister Consoles is 2  

Turntable Style is Titanium 

Robot Type



Process Modules

1.Fluid Delivery Module (FDM)

2.Process Module (PM)

3.Material Handling Module (MHM)

4.Canister Console(s)

5.Power Distribution Cabinet

Canister #







Overall Condition:Some parts are missing and cannot be turned on

Visible Corrosion:No

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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