Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Multi Block (Resist Coater/Developer)
Date of Manufacture: 2021-12-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Gyeonggi-do, Korea, Republic of
Available date: 6/6/2026
· CAR
· COT
o With MACRD Pump
o Drain – Direct Drain
· BCT
o With MACRD Pump
o Drain - Direct Drain
· ITC
o With MACRD Pump
o Drain - Direct Drain
o CCSS
· DEV: PTD
o DEV Nozzle: MGP
o Rinse Nozzle: ADR Nozzles
o FIRM Nozzle
o CCSS
· DEV: NTD
o NTD Nozzle: IDN Nozzle
o CCSS
· PIR
o IDR Nozzle
· BST2
· WISD
· WISeCAM
· Incoming WISC
· Chemical Supply
· IFB -ASML
· On Line -GJG
· Chemical Auto Supply (COT,DEV)
· T&H Controller : Customer Provided
· Chemical Filter: Customer Provided
· Smart Bypass
· Individual EV
· Ingenio GL License: OEM support/Buyer
· Parameter Upload
· Dispense Line Monitor
· SAFETY Spec
· Defect Item (IFF-R/IR/SCS)
· AFF-R
· PR Usage Monitoring
· Double Containment Piping
· Fixation Bracket
· Essential Common Spec
· AC Power Box EFEM Power Option
· RAC, SMM
· RF-ID (ICHOR), RCS, PR Usage Monitoring
· Source Parameter FDC Upload
· PCS2 Pump, HP AMC Valve, SPO
· Bevel Rinse
· BST2 Defense System 2.0
· BST2 Shower Bath
· WEE N2 Purge FDC Upload
· P Chamber N2 Purge Miss-Connection Detection
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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