Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2015-05-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
AMAT PREXT 11-3AMAT_PREXT_OX_03
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1303381
Micron MISTI/LID #: APXTB70200
Vendor Tool Serial #: 424063
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: AMAT
Tool Model: PREXT
Retrofit Part Type 1: NA
Chamber Name 1: A
Chamber Name 2: B
Chamber Name 3: C
Chamber 1 Description: PRODUCER
Chamber 2 Description: PRODUCER
Chamber 3 Description: PRODUCER
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
N2 Load Port Exists 3: No
Optional Gas 1: NA
Custom Gas Lines 1: Cl2, 250sccm
Custom Gas Lines 2: NF3, 500sccm
Custom Gas Lines 3: H2, 2000sccm
Custom Gas Lines 4: CH2F2, 100sccm
Custom Gas Lines 5: CF4, 700sccm
Custom Gas Lines 6: CF4, 100sccm
Custom Gas Lines 7: O2, 100sccm
Custom Gas Lines 8: O2, 2000sccm
Custom Gas Lines 9: N2, 200sccm
Custom Gas Lines 10: CHF3, 200sccm
Custom Gas Lines 11: Ar, 100sccm
Custom Gas Lines 12: Ar, 1000sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
