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Toray Engineering Co., Ltd. FC3000WL

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Asset ID: 215471

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Toray Engineering Co., Ltd.

FC3000WL

Flip Chip Bonder

Bonder

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Audit to verify



======================= OEM Feature ===========================

FC3000W series Flip Chip Bonder for Chip on Wafer (COW)

Overview

Flip chip bonder (for Chip on Wafer)

Capable of stacking application in various programs for handling 3D packaging.

Can be used in various work processes such as flux, NCP, NCF, and Cu pillars.

Features

  • Able to handle 12-inch wafers.
  • A variety of temperature, pressure, and height profile settings are possible due to its own unique ceramic heater, and control method for pressure and position.
  • Able to achieve high accuracy (±2 μm) with its moving search function and highly stiff frame.
  • Able to achieve the most appropriate gap with its unique head gap control function.
  • Can be used for low pressure to high pressure regions by changing over the head.

Optional functions

Ultra-low pressure head; face up unit; dispenser; flux; bonding inspection unit; upper communication, etc.


Lineup

FC3000WS

Semi-automatic flip chip bonder for small volume production.

FC3000W

Fully automatic flip chip bonder with chip loader.

FC3000WL

Fully automatic flip chip bonder for mass production, with chip feeder, and wafer loader/unloader.


Specifications for FC3000W series

Specification/ModelFC3000WSFC3000WFC3000WL
Machine typeSemi-automatic COW bonder for R&D useBonder with chip loader for mass production useCOW bonder with chip loader and wafer loader/unloader for mass production use
Substrate size8”,12” t=0.725-1(㎜)8”,12” t=0.725-1(㎜)8”,12” t=0.725-1(㎜)
Chip size (mm): Thermo-compression bonding *13–20 mm long x 3–20 mm wide (t=0.05–1.0 mm)3–20 mm long x 3–20 mm wide (t=0.05–1.0 mm)3–20 mm long x 3–20 mm wide (t=0.05–1.0 mm)
Chip type1-411
Chip loading method2”/4” trayWafer or tray palletWafer or tray pallet
Chip orientationFace down(Face up possible with an optional unit)Face upFace up
Cycle time *26.0sec/chip(when flipper is used)2.0sec/chip2.0sec/chip
Alignment accuracy (3 σ)*3±2μm(X,Y)±2μm(X,Y)±2μm(X,Y)
Bonding head typeCeramic heater head:temperature RT-450℃Ceramic heater head:temperature RT-450℃Ceramic heater head:temperature RT-450℃

NOTE

*1 Large-sized chip (max. 30.0 mm long x 30.0 mm wide) can be processed as an option.

*2 Cycle time does not include processing time (i.e. searching, bonding and vacuum release).

*3 Accuracy measurement is taken using Toray-standard substrates.



The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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