Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
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Date of Manufacture: 2012-01-09
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Tool has been deinstalled and in the warehouse.
Inspect to confirm configuration and condition.
Tool Model: DJ-1206VN-DF
Process: Poly_DS
Software version: V01.66.01
System power rating: 120VAC 1PHase
Loading configuration: 5 lots loading
Furnace Unit:
1. Cartridge Heater, Qty 1
2. T/C for Heater Control, Qty 5
3. T/C for Over temperature Protection, Qty 5
4. 5-P T/C for Cascade Control, Qty 1
Controller:
1. Main Controller (OU) , Qty 1
2. Main Operation Unit, Qty 1
3. Sub Operation Unit, Qty 1
4. Process Module Controller, Qty 1
5. Temperature Controller, Qty 2
7. MFC/ Pressure Unit, Qty 1
8. FOUP Loader Controller Unit, Qty 1
9. Wafer Handling Controller Unit, Qty 1
10. Valve/Interlock Control Unit, Qty 1
11. Switching Unit, Qty 1
12. Signal Tower (Front) , Qty 1
13. Gas Flow Pattern Panel, Qty 2
Drive Mechanisms:
1. I/O Shutter, Qty 1
2. AGV/PGV/OHT Stage, Qty 1
3. FOUP loader, Qty 1
4. Rotation FOUP Storage, Qty 1
5. FOUP Opener, Qty 1
6. Wafer Detection, Qty 2
7. Wafer Transfer, Qty 1
8. Variable Wafer Pitch Converter, Qty 1
9. Boat Elevator, Qty 1
10. Boat Changer, Qty 1
11. Furnace Port Shutter, Qty 1
12. Boat Rotation, Qty 1
Gas System:
1. Gas Unit (IGS) , Qty 1
Exhaust System:
1. Dry Pump & Mechanical Booster Pump, Qty 1
2. Pressure sensor (1000 Torr) , Qty 1
3. Pressure sensor (10 Torr) , Qty 1
4. Pirani sensor, Qty 2
5. Main valve, Qty 1
6. Exhaust Piping, Qty 1
7. Exhaust Dilution Line, Qty 1
8. Reactor Tube Press Leak Line, Qty 1
10. Jacket heater pipe exhaust pipe, Qty 1
11. TapeHeater for exhaust pipe, Qty 1
12. Inlet Heater, Qty 1
13. Valve Heater, Qty 3
Safety:
1. Light Curtain System, Qty 1
Other:
1. OHT I/F Unit, Qty 2
2. Gateway-HSMS, Qty 1
3. RF ID Reader, Qty 2
4. Chemical Filter, Qty 2
N2 Purge Load Lock System:
1. O2 Monitor/Detector, Qty 1
2. FOUP Opener N2 Purge System, Qty 1
3. Loading Area N2 flow control MFC, Qty 1
4. Loading Area N2 Purge Line, Qty 1
5. FOUP Opener N2 Purge Line, Qty 1
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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