Kokusai Quixace II Doped Poly

Equipment details:

Date of Manufacture: Dec 2011

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Inspect to confirm configuration and condition.

Tool Model: DJ-1206VN-DF

Process: Poly_DS

Software version: V01.67.00

System power rating: 120VAC 1PHase

Loading configuration: 5 lots loading

Furnace Unit:

1. Cartridge Heater, Qty 1

2. T/C for Heater Control, Qty 5

3. T/C for Over temperature Protection, Qty 5

4. 5-P T/C for Cascade Control, Qty 1

Controller:

1. Main Controller (OU) , Qty 1

2. Main Operation Unit, Qty 1

3. Sub Operation Unit, Qty 1

4. Process Module Controller, Qty 1

5. Temperature Controller, Qty 2

7. MFC/ Pressure Unit, Qty 1

8. FOUP Loader Controller Unit, Qty 1

9. Wafer Handling Controller Unit, Qty 1

10. Valve/Interlock Control Unit, Qty 1

11. Switching Unit, Qty 1

12. Signal Tower (Front) , Qty 1

13. Gas Flow Pattern Panel, Qty 2

Drive Mechanisms:

1. I/O Shutter, Qty 1

2. AGV/PGV/OHT Stage, Qty 1

3. FOUP loader, Qty 1

4. Rotation FOUP Storage, Qty 1

5. FOUP Opener, Qty 1

6. Wafer Detection, Qty 2

7. Wafer Transfer, Qty 1

8. Variable Wafer Pitch Converter, Qty 1

9. Boat Elevator, Qty 1

10. Boat Changer, Qty 1

11. Furnace Port Shutter, Qty 1

12. Boat Rotation, Qty 1

Gas System:

1. Gas Unit (IGS) , Qty 1

Exhaust System:

1. Dry Pump & Mechanical Booster Pump, Qty 1

2. Pressure sensor (1000 Torr) , Qty 1

3. Pressure sensor (10 Torr) , Qty 1

4. Pirani sensor, Qty 2

5. Main valve, Qty 1

6. Exhaust Piping, Qty 1

7. Exhaust Dilution Line, Qty 1

8. Reactor Tube Press Leak Line, Qty 1

10. Jacket heater pipe exhaust pipe, Qty 1

11. TapeHeater for exhaust pipe, Qty 1

12. Inlet Heater, Qty 1

13. Valve Heater, Qty 3

Safety:

1. Light Curtain System, Qty 1

Other:

1. OHT I/F Unit, Qty 2

2. Gateway-HSMS, Qty 1

3. RF ID Reader, Qty 2

4. Chemical Filter, Qty 2

N2 Purge Load Lock System:

1. O2 Monitor/Detector, Qty 1

2. FOUP Opener N2 Purge System, Qty 1

3. Loading Area N2 flow control MFC, Qty 1

4. Loading Area N2 Purge Line, Qty 1

5. FOUP Opener N2 Purge Line, Qty 1

Faulty Parts: -

N2 Purge Box Unit: Fucntional but rusty (refer to photo)