Macquarie Semiconductor and Technology on behalf of Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V. for its Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme IMS
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2007-12-31
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Duisburg, Germany
Available date: Currently Available
***Macquarie will manage the deinstallation, rigging, and crating at Buyer’s expense. Quotes for these services will be provided to buyer following tool award, or upon request.***
Shipping is the full responsibility of the buyer using their selected vendor, however transportation/shipping quotes are also available upon request.
ESTIMATED REMOVAL COSTS:
DEINSTALLATION: $8,349.00
RIGGING: $22,606.37
WAREHOUSE HANDLING: $4,948.25
CRATING: $5,317.78
FINAL COSTS MAY BE DIFFERENT AND WILL BE BASED ON ACTUAL COSTS.
Part Number 1080-6037 Original Ship Date from OEM 2007 Software Version 1.8.7.0.06 Is System On-Line? Yes CE Mark Certified? Yes OEM Audit Available? No Decontamination Report Exists? No Can Produce Wafers AS IS? Yes Any Known Field Modifications? No All Cables Present? Yes System Configuration System Type RapidStrip 210 ES Number of Cassettes 2 Load Type Standard Install Type Through-the-Wall Mini-Environment No Robot Type Brooks Endpoint Detection Type Monochromator Throttle Valve MKS Foreline Valve VAT Cooling Station Y SECS/GEMS Yes Ozone/Microwave Generator Details Chamber Position Mfgr. Model 1 Matrix 3kw switchmode powergen Included: Pump: IQDP 80 + QMB1200 Mechanical Booster
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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