Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
PECVD (Chemical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1325898
Micron MISTI/LID #: PEPRBCA200
Vendor Tool Serial #: 436272
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: AMAT
Tool Model: AMAT PRODGT
Software Version (include revision #): pmB5.5_147
System Power Rating: 110 AC 3-Phase for System
Loading Configuration: 4 LP/9 cooling station/ 25 wafer FOUP
Retrofit Part Type 1: NA
Chamber Name 1: A
Chamber Name 2: B
Chamber Name 3: C
Chamber 1 Description: TEOS GT TWIN, Process Kit, TEOS
Chamber 2 Description: TEOS GT TWIN, Process Kit, TEOS
Chamber 3 Description: TEOS GT TWIN, Process Kit, TEOS
OEM Cable 1: EMO cable
OEM Cable 2: HX water pipe
OEM Cable 3: Pump signal/Device net
OEM Cable Length 1: 2250
OEM Cable Length 2: 2250
OEM Cable Length 3: 2250
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
N2 Load Port Exists 3: No
N2 Load Port Exists 4: No
Optional Gas 1: NA
Optional Gas 6: NF3 5000sccm
Optional Gas 8: AR 10000sccm
Optional Gas 9: HE_TEOS 15000sccm
Optional Gas 12: O2 15000sccm
Optional Gas 18: N2 purge
Optional Gas 19: N2 purge
Custom Gas Lines 3: TEOS 7000mgm
Custom Gas Lines 4: TEOS 7000mgm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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