Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
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PECVD (Chemical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Technology:DCVD
Platform Type:Producer GT
System software:B5.3_95
FiCGUI:Fb4.40_19
GP:8.0.55.2
DTauMacros:9.2_40
Robot type:FX
Robot Blades:0200-07302
LL preheater:0090-04659
slit valve door:0190-47444(Armor)
MF pump:EBALE XHT200WN
LL pump:EPX 180 TWIN DRY VACCUM PUMP 3620-00517"
Diffuser:0190-37371
Chamber Type:PE Silane
RF Generator 1 (HF):0920-00107
RF Generator 2 (LF):0190-08677
Heater:0010-36738
Slit Valve:3870-04001(G67P)
Rf Filter:0090-04736
Foreline TV:0190-19203
Foreline ISO:3870-03210
Gas box:0040-53688
FACEPLATE:0040-95475
BLOCKER:0021-26544
PUMPING LINER side1:0200-02407
PUMPING LINER side2:0200-02408
LINER CERAMIC TOP:0200-02972
LINER CERAMIC MIDDLE:0200-02973
LINER CERAMIC BOTTOM:0200-02974
CERAMIC ISOLATOR:0021-27290
LIFT PINS, FLOATING(BIG FOOT):0200-03314
LIFT HOOP:0200-03312
Spacer Side 1:0021-24181
Spacer Side 2:0021-24182
RPS:0920-00013
Gas Box Configuration
Line 1 - EMPTY -
Line 2 - EMPTY -
Line 3 TEOS_1/7000
Line 4 TEOS_2/7000
Line 5 - EMPTY -
Line 6 NF3/5000
Line 7 - EMPTY -
Line 8 AR/10000
Line 9 HE_C/15000
Line 10 - EMPTY -
Line 11 - EMPTY -
Line 12 O2/15000
Line 13 - EMPTY -
Line 14 - EMPTY -
Line 15 - EMPTY -
Line 16 - EMPTY -
Line 17 - EMPTY -
Line 18 Purge02
Line 19 Purge03
Line 20 - EMPTY -
Line 21 - EMPTY -
Line 22 - EMPTY -
Pump:EBALE XHT200WN
Scrubber
inlet:4xinlet
Scrubber:Unisem
vacuum line temp:150
Liquid line temp.
TEOS_1 injection temp. 150
TEOS_2 injection temp. 150
Heated line2 120
Heated line3 140
Heated line4 140
Heated line5 120
Heated line6 140
Heated line7 140
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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