Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2009-01-01
Currently Configured for: 300mm
Current Equipment Status: Incoming
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
CVD 11-3AMAT_PRGT_APFX AMAT PRODGT APF
Tool config is based on original PO, please verify tool details at tool inspection
OEM: AMAT
Tool Model: AMAT PRODGT
Software Version (include revision #): pmB5.4_135
System Power Rating: 110 AC 3-Phase for system
Loading Configuration: 3 LP / 7 cooling station / 25 wafer FOUP
Chamber Name 1: A
Chamber Name 2: B
Chamber Name 3: C
Chamber 1 Description: APF TWIN Chamber
Chamber 2 Description: APF TWIN Chamber
Chamber 3 Description: APF TWIN Chamber
Chamber 1 Chemicals Gases Used: C3H6/C2H2/H2/HE_HI/HE_LO/NF3_CLN/O2_CLN/AR_LO/N2/AR_HI/O2
Chamber 2 Chemicals Gases Used: C3H6/C2H2/H2/HE_HI/HE_LO/NF3_CLN/O2_CLN/AR_LO/N2/AR_HI/O2
Chamber 3 Chemicals Gases Used: C3H6/C2H2/H2/HE_HI/HE_LO/NF3_CLN/O2_CLN/AR_LO/N2/AR_HI/O2
OEM Cable 1: EMO cable
OEM Cable 2: HX water pipe
OEM Cable 3: Device net & Pump signal
OEM Cable Length 1: 2250
OEM Cable Length 2: 2250
OEM Cable Length 3: 2250
Optional Gas 1: NF3_CLN 1000sccm
Optional Gas 2: C3H6 3000scm
Optional Gas 3: C2H2 4000sccm
Optional Gas 4: H2 10000sccm
Optional Gas 8: AR_CLN 15000sccm
Optional Gas 9: O2_CLN 15000sccm
Optional Gas 10: HE_HI 5000sccm
Optional Gas 11: HE_LO 1000sccm
Optional Gas 12: AR_LO 2000sccm
Optional Gas 13: N2 15000sccm
Optional Gas 14: AR_HI 15000sccm
Optional Gas 15: O2 15000sccm
Gas TOR 1: " N2 Purge"
Gas TOR 2: " NF3- 1SLM"
Gas TOR 3: Ar- 10SLM
Gas TOR 4: O2- 15SLM
Gas TOR 6: " N2 Purge"
Gas TOR 7: " C3H6- 3SLM"
Gas TOR 8: He- 5SLM
Gas TOR 9: " H2- 10SLM"
Gas TOR 15: Ar- 3SLM
Gas TOR 16: " N2- 10SLM"
Gas TOR 17: Ar- 15SLM
Gas TOR 18: O2- 15SLM
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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