Macquarie Semiconductor and Technology on behalf of Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V. for its Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme IMS
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
HDP CVD (Chemical Vapor Deposition)
Date of Manufacture: 2010-12-31
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Duisburg, Germany
Available date: Currently Available
***Macquarie will manage the deinstallation, rigging, and crating at Buyer’s expense. Quotes for these services will be provided to buyer following tool award, or upon request.***
Shipping is the full responsibility of the buyer using their selected vendor, however transportation/shipping quotes are also available upon request.
ESTIMATED REMOVAL COSTS:
DEINTALLATION: $24,035.00
RIGGING: $20,024.70
WAREHOUSE HANDLING: $4,383.16
CRATING: $14,423.72
FINAL COSTS MAY BE DIFFERENT AND WILL BE BASED ON ACTUAL COSTS.
Refurbished 2010 by SSS Co. Date of Audit 22-Mar-23 Serial Number 326383 controller 318748rob 318778ch 326385sw Original Ship Date from AMAT 2001 Wafer Size (inches) 8 Install Type Through-the-wall Software Version B5216 Is System On-Line? Yes CE Mark Certified? Yes OEM Audit Available? No Decontamination Report Exists? No Can Produce Wafers AS IS? No Any Known Field Modifications? Refurbished 2010 SSSco All Cables Present? Yes Mainframe Type Centura (Common) Chamber Process Position A Ultima+ HDPCVD Position B Ultima+ HDPCVD Position E Multi-slot cool Position F Orienter Signal Lamp Tower No Loadlock Type NB w/Tilt Out Wafer Slide Sensor No Bolt-On-SMIF No Robot Type HP Blade Type Ceramic Transfer Lid Hoist Yes Wafer on Blade Sensor OTF SBC Version V452 Remote Service Monitors Yes GEMS Yes Gate Valve VTEX Turbo Pump Make/Model Ebara ET1600WS Dual Independent Helium Control 10/10 TORR (std) Clean Method Top Mount (RPS) Upper Chamber Part No. 0010-18259 Chamber Position Mfgr. Model Position A - Top ENI NOVA-50 Position A - Side ENI NOVA-50 Position A - Bias Trumpf TruPlasma 3000G2 Position B - Top ENI NOVA-50 Position B - Side ENI NOVA-50 Position B - Bias ENI GHW-50 Gas Delivery Type MLD Gas Panel Interface Type Configurable Gas Panel Exhaust Bottom / Left Box 16 Gas Box Configuration Gas Line # Gas 1 He 2 N2 3 N2 4 Ar 5 O2 6 NF3 7 NF3 8 SiH4 9 SiH4
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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