Macquarie Semiconductor and Technology on behalf of Inspire Technologies, Inc.

Delatech Inc. 858 - V2

Asset ID: 210767

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Delatech Inc.

858 - V2

Abatement - CDO Scrubber

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Caldwell, United States

Available date: Currently Available

Quantity : 2


he Delatech CDO 858/859 Exhaust Gas Scrubber has long been considered the standard for Advanced Chemical Vapor Deposition (CVD) Process gas abatement, and has been effectively used with all PECVD, LPCVD & MOCVD process gases.  Delatech scrubbers are also widely used in Thin Film processes. This versatile gas scrubber utilizes a combination Thermal Oxidation Chamber and a Primary/Secondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.

CDO 859 Reconditioning Process (high level)

  • Thermal chamber & wet scrub assembly is removed, decontaminated and cleaned.
  • Spray nozzles checked for proper flow rate and repositioned for optimum coverage.
  • Scrubber balls, O-rings, and seals are cleaned and/or replaced.
  • Recirculation unit is cleaned — components checked and recalibrated if necessary.
  • CDO is then reassembled, functions are tested, sensor/alarms are checked.
  • Gas Scrubber is tested at full temperature for 24 hours to ensure optimal working order.
  • All systems are backed by CSI’s 6 month warranty

Standard Features

  • 1, 2, or 4 inlet nozzles (allowing up to 4 connections to process chambers, process tools, or vacuum pumps)
  • Thermal Reaction Chamber features a resistive heating element.
  • Primary and Secondary wet cooling/scrubbing sections.
  • Demister Washing System provides automatic cleaning
  • Exhaust Moisture Suppression System.
  • Liquid level detection.
  • Tool interlocks to process tools

Available Options

  • Cooling/Scrubbing Recirculation
  • Sump Pump
  • Cabinet Exhaust Alarm
  • CSI Designed “U” Drain and Cooling Nozzle Assembly (see photos above)

 Delatech CDO Selection Criteria

  • Mixture of Gases
  • Individual & Total Gas Flow Rates
  • Duty Cycle
  • Single Pass or Water Recirculation
  • Number of Ports Desired ( 1 – 4 )
  • Desired Options


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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