Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Canon FPA-6000 ES5

Disclaimer

The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.


Asset ID: 215938

Enquire about this product Print spec sheet

Canon

FPA-6000 ES5

248nm (KrF) Scanner

Lithography Equipment

Equipment details:

Date of Manufacture: 2004-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


OEM: CAN

Tool Model: FPA-ES5000


Damage/Missing parts list

Missing: slit-CS PCB 

Missing: exposure slit unit cable

Missing: exposure slit unit motor

Missing: POWER SUPPLY

Missing: HDD of Rear PanelCom-1

Missing: PSR-DT PCB

Missing: RH FET BOX

Missing: F-6(125V,1A)

Missing: PRE-ALIGNMENT UNIT, RETICLE PN: GY1-0414-J00-000

Missing: PRA CCD AMP

Missing: PRA PCB

Missing: RH finger

Missing: PW MV

Missing: DCON-Dist2 PCB

Missing: FET -L box

Missing: PDU6(WRC)

Missing: Driver PDU6

Missing: HV-PWR 2,3,4,5,7,8,9,10,11,13

Missing: Dcon-ain PCB

Missing: WYL board

Missing: RH FET box PN:BH2-2353

Missing: RH counter

Missing: SH counter

Missing: SHGY sensor

Missing: RJYR

Missing: PSR-DT PCB

Missing: Fuse F6

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.