Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ebara FREX300S Tungsten

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Asset ID: 209613

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Ebara

FREX300S Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2007-07-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Please refer to tool photos


Robot model: Yoshikawa 

Nova Scan model: 3090

Chiller: Advanced Thermal Sciences: SX-21


Damage/Missing parts list

Parts swap- Polish A- RR Three-way valve (三通閥) Qty1

Parts swap- Polish B- RR AIR BAG Qty1, PUSHER Cardan shaft (萬象軸承) Qty1

Parts swap- Polish C- RR AIR BAG, PUSHER Cardan shaft (萬象軸承)

Parts swap- L SIDE 3F- DRIVER C-5102-063-0001 Qty1 (200B), C-5102-064-000 Qty 1 MR-J2S-350B-PR113

Parts swap- R SIDE 3F- DRIVER C-5102-063-0001 Qty1 (200B), C-5102-064-000 Qty1 

Parts swap- CLEANER 3F- DRIVER C-5102-066-0001 Qty1 AMPLIFIER SERVO (SGDS-10A32A), C-5102-068-0001 Qty2 SGDS-02A32A

Parts swap- CLEANER 1F- C-5102-065-0001 Qty6

Parts swap- HMI Power box- THREE BRANCH TAP C-5500-124-0001 Qty1

Parts swap- Cleaner Side Monitor- Qty1

Please inspect tool to reconfirm, swap parts working condition is not confirmed

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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