Macquarie Semiconductor and Technology on behalf of IBM Corporation

JEOL JEM-2010F

Asset ID: 210856

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JEOL

JEM-2010F

TEM

Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Location of Equipment: Yorktown Heights, United States

Available date: Currently Available

 

 JEOL 2010F TEM is a transmission electron microscope with a field emission gun and 200 keV maximum accelerating voltage.


installed at IBM T. J. Watson Research Center in Yorktown Heights, N

- functioning in Yorktown for in-situ TEM experiments.

- high tilt pole piece to enable in-situ sample holders.


FE gun wait to maintenance, otherwise the tool was fully functional.

several Gatan specialty holders that were purchased for the tool and never used:

(cooling, heating and biasing holders)

EDAX energy dispersive x-ray system and Gatan Tridium EELS system.

Both EDS and EELS were not installed at IBM Yorktown and are still in boxes in the lab.


Original date of purchase or date of mfg: ~2000

     

Type of product processed through this tool: 3 mm samples

    

 Last Date Operated: (MM/DD/YY): ~06/2021

 

================================= Reference ==============================

The JEM-2100F is a multipurpose, 200 kV FE (Field Emission) analytical electron microscope. Variety of versions is provided to adapt user’s purposes. The FE electron gun (FEG) produces highly stable and bright electron probe that is never achieved with conventional thermionic electron gun. This feature is essential for ultrahigh resolution in scanning transmission microscopy and in an analysis of a nano-scaled sample. Various analytical instruments and/or cameras such as EDS (Energy Dispersive X-ray Spectrometer) or EELS (electron energy loss spectrometer) or CCD cameras are ready for integration with a PC system of the microscope control.


Specifications

Configuration*1Ultrahigh resolution
(UHR)
High resolution
(HR)
High specimen tilt
(HT)
Cryo polepiece
(CR)
High contrast
(HC)
PolepieceURPHRPHTPCRPHCP
Resolution
 Point0.19 nm0.23 nm0.25 nm0.27 nm0.31 nm
 Lattice0.1 nm0.1 nm0.1 nm0.14 nm0.14 nm
Acc. Voltage*2160 kV,200 kV*1
 Minimum step50 V
 Step size50 V minimum
Electron source
 EmitterZrO/W(100) Schottky
 Brightness≧4×108 A / cm2 / sr
 Pressure×10-8 Pa order
 Probe current0.5 nA for 1 nm probe
Power Stability
 Acc. voltage≦1×10-6/min
 OL current≦1×10-6/min
Optical parameters for objective lenses
 Focal length1.9 mm2.3 mm2.7 mm2.8 mm3.9 mm
 Spherical aber. coef.0.5 mm1.0 mm1.4 mm2.0 mm3.3 mm
 Chromatic aber. coef.1.1 mm1.4 mm1.8 mm2.1 mm3.0 mm
 Minimum focal step1.0 nm1.4 nm1.8 nm2.0 nm5.2 nm
Spot Size (diameter)
 TEM mode2 to 5 nm7 to 30 nm
 EDS mode0.5 to 2.4 nm--4 to 20 nm
 NBD mode---
 CBD mode1.0 to 2.4 nm-
Parameters for convergent beam diffraction
 Convergence angle1.5 to 20 mrad--
 Acceptance angle±10°--
Magnification
 MAG mode×2,000 to 1,500,000×1,500 to 1,200,000×1,200 to 1,000,000×1,000 to 800,000
 LOW MAG mode×50 to 6,000×50 to 2,000
 SA MAG mode×8,000 to 800,000×6,000 to 600,000×5,000 to 600,000×5,000 to 400,000
Camera Length
 SA diffraction(mm)80 to 2,000100 to 2,500150 to 3,000
 HD diffraction(m)4 to 80
 HR diffraction*2333 mm
Specimen shift
 X,Y2 mm2 mm2 mm2 mm2 mm
 Z±0.1 mm±0.2 mm±0.2 mm
Specimen tilt
 X / Y*3±25/±25°±35/±30°±42/±30°±15/±10°±38/±30°
 X*4±25°±80°±80°±80°±80°
STEM*5
 Bright-field lattice resolution0.2 nm--
EDS*6
 Solid angle(30mm2)0.13 sr.0.13 sr.0.13 sr.*80.09 sr
 Solid angle(50mm2)*70.24 sr.0.28 sr.0.23 sr.
 Take-off angle(30mm2)25°25°25°*820°
 Take-off angle(50mm2)*722.3°24.1°25°


*1 : Select either configuration when ordering the JEM-2100F.

*2 : 80 kV, 100 kV and 120 kV are possible with the optional short-circuit switches for the accelerating tube.

*3 : With the Specimen Tilting Holder (EM-31630).

*4 : With the High Tilt Specimen Retainer (EM-21310).

*5 : With the optional scanning image observation device.

*6 : With the optional EDS detector.

*7 : With the JEOL 50 mm2 EDS detector.

*8 : EDS detectors are unavailable.

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