Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
OEM: PSK
Tool Model: PSK Supra IV
Process: Asher Strip
Software Version: 1.91
System Power Rating: Asher Strip
Loading Configuration: 3 load position
Chm/Unit Position 1: (2 stage/chamber) HT type, Gases Used: O2 / N2 / 4%H2/N2 / CHF3
Chm/Unit Position 2: (2 stage/chamber) HT type, Gases Used: O2 / N2 / 4%H2/N2 / CHF3
N2 Load Port Exists: No
Main Body
Load Port: Fixed Buffer
System wide corrosion free: Yes(SUS304)
Wafer Breakage Detection
LCD Monitor: VX1500M-T
System Controller
CPU: Pentium 4
Hard disk: 80GB
1st data back-up:3.5" FDD
2nd data back-up: CD-RW
Operation Monitor: 15" LCD
Signal Tower: 4 color Dual Polemount Type
R.C.S(Remote Control System)
Utility
Main Power: 3ψ 208VAC 60HZ 250A
UPS Power: 1ψ 208VAC 60HZ 63A
Power Vaccine: 1sec
Electric & signal cable Length: 20M
UPS Battery: YES
Circuit Break Type: MCCB Type
Water Manifold valve: Shut off v/v
All Utility Feed Direction: Bottom-up feed
Transfer module
TM ROBOT Body: SANKYOSR8232-0003AAR
TM ROBOT Controller: SANKYOSC3150
TM ROBOT Power box
EFEM ROBOT: SANKYO SR8240-0001AAS
Chamber 1 & 2
Dry Pump:
APC valve: MKS 653B-4-100-2
APC Controller: MKS 651C-26831
Baratron Sensor: MKS 626A02TBE
Pressure Transducer (pirani): MKS 750B13TCD2GG
EPD Controller: NANOTEK NEFL-309S
Heater Module: WATLOW
FCIP-Generator: AX7690PSK-04
Gas Box: IGS Type
Pressure Control: Throttle Valve
Chamber 1 & 2 process gas line
GAS #1(O2): 20slm
GAS #2(N2): 3slm
GAS #4(H2N2): 5slm
GAS #6(CHF3): 500sccm
Purity: 10RA
MFC Signal: Digital
Gas Line Polishing: Electrical Polished
Regulator
Air Operated Valve: Fujikin
Filter: Millipore
Pressure Transducer: Tem Tech
Damage/Missing parts list
Damage- CTC control
Please inspect tool to reconfirm
Dry pumps and customer provided item
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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