Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) Telius SP-305 SCCM

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Asset ID: 211122

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Tokyo Electron Ltd. (TEL)

Telius SP-305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2008-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 9/1/2025

Tool is exposed to Copper Process.

Tool config is based on original PO, please verify tool details at tool inspection

OEM: TEL

Tool Model: TeliusSP-SCCM

Software Version (include revision #): Ver6.75-Rev000

System Power Rating: 200 AC 3-Phase

Loading Configuration: 4 load port

Chamber Name 1: Process ship 1

Chamber Name 2: Process ship 2

Chamber Name 3: Process ship 3

Chamber Name 4: Loder Module

Chamber 1 Description: SCCM

Chamber 2 Description: SCCM

Chamber 3 Description: SCCM

Chamber 4 Description: Telius LM

Chamber 1 Chemicals Gases Used: N2,Ar,C4F6,C4F8,O2,CF4,CHF3,CH2F2,CO

Chamber 2 Chemicals Gases Used: N2,Ar,C4F6,C4F8,O2,CF4,CHF3,CH2F2,CO

Chamber 3 Chemicals Gases Used: N2,Ar,C4F6,C4F8,O2,CF4,CHF3,CH2F2,CO

Optional Gas 1: Ar

Optional Gas 2: C4F6

Optional Gas 3: C4F8

Optional Gas 4: CAP

Optional Gas 5: CAP

Optional Gas 6: CAP

Optional Gas 7: O2

Optional Gas 8: O2

Optional Gas 9: CF4

Optional Gas 10: CHF3

Optional Gas 11: CH2F2

Optional Gas 12: CO

Optional Gas 13: CAP

Optional Gas 14: C4F8

Optional Gas 15: CAP

Optional Gas 16: O2

Custom Gas Lines 1: 1420.5sccm

Custom Gas Lines 2: 50.3sccm

Custom Gas Lines 3: 43sccm

Custom Gas Lines 7: 60.8sccm

Custom Gas Lines 8: 561.1sccm

Custom Gas Lines 9: 145.9sccm

Custom Gas Lines 10: 100.4sccm

Custom Gas Lines 11: 57.7sccm

Custom Gas Lines 12: 500sccm

Custom Gas Lines 14: 13.7sccm

Custom Gas Lines 16: 18.7sccm


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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