Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2006-01-07
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
HARD DRIVE WILL BE REFORMATTED. OPERATING SOFTWARE IS NOT INCLUDED.
Inspect to confirm configuration and condition.
| General System Info | |
| Equipment ID | DDFINP-04 |
| Date of Audit | 14-Feb-22 |
| Serial Number | UV1165 |
| Original Ship Date from KLA | 2006 |
| Wafer Size (inches) | 12 |
| Loading Configuration | FOUP |
| Number of Cassette/FOUP Positions | 2 |
| Software Version | 6.3.89.5 |
| Login User ID | NA |
| Login Password | NA |
| Electrical Requirements | |
| Is System On-Line? | No |
| Off-Line Date (if applicable) | NA |
| CE Mark Certified? | Yes |
| Date of Last PM | NA |
| Date of Last Laser Change | NA |
| OEM Audit Available? | Yes |
| Can Produce Wafers AS IS? | Yes |
| Any Known Field Modifications? | No |
| All Cables Present? | Yes |
| System Configuration | System Type |
| Main Platform | Fusion LUV |
| Key Common Options | Included? |
| Clean Room Manuals | No |
| Standard Manuals | No |
| External Panels (Skins) | Cleanroom White |
| Chuck Type | Universal Ceramic / Other |
| GEM/SECS Interface | Yes |
| AIT LUV Series Options | |
| Hierarchical Load Adaptive Thresholding (HLAT) | Yes |
| Auto-Positioning System | Yes |
| iADC Processor | Yes |
| Internal Review – Optical Microscope | |
| Spot Optics (um) | 3.5 um, 6 um |
| External Support Equipment | |
| Laser Power Supply | Yes |
| Image Computer | Yes |
| Blower Box | Yes |
| Number of Blower Boxes | 1 |
| Chiller Make/Model | KLA PILLAR |
Assy-LSR Servo Detector parts was lend out to recovers others contract running tools on Oct-22 due KLA long lead time.
KLA had return new parts recently but the tools was decommission from original place to temporary storage.
The parts(Parts purchase from KLA) was installed back as show in Pic:
210191(133)
210191(133)(1)
210191(133)(2)
Damage/Missing parts list
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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