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KLA-Tencor Corp / SensArray SensArray 1530


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Asset ID: 210739

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KLA-Tencor Corp / SensArray

SensArray 1530

Temperature Monitoring

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Caldwell, United States

Available date: Currently Available

DOMESTIC SALE: Only offers from US entities will be considered. Seller will not clear the equipment for export or act as Exporter of Record from the United States.

P/N : 1530A-8-0012

Q'ty : 2

Condition : Good and open box

SensArray 1530

The Process Probe 1530 characterizes and fine-tunes your process conditions to improve equipment performance, wafer quality, and yield. The Process Probe 1530 is designed for use in temperatures ranging from 0°C to 1100°C, and for a wide range of applications including cold wall, RTP, sputtering, CVD, plasma strippers, and epitaxial reactors.

Our specially patented ThermaBond technique is utilized to ceramically bond the deeply immersed thermocouple into a re-entrant cavity in the silicon to improve heat transfer and bond strength. The 1530 allows you to measure wafer temperatures directly, in real time, during each critical step of your process cycle. The Process Probe 1530 optimizes temperature controller parameters, improves uniformity in multi-zone heaters, and determines wafer temperature stabilization times.


Technology : ThermaBond Thermocouple Technique

Applications : Wafer; CVD / PVD; Etching

Measurements : Temperature

Wafer / Part Size : 50 to 300 mm (2.0 to 11.8 inch)

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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