Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2006-10-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
MTSN ASPHT 11-3MTSN_ASPHT_STR_02CLN
Micap #: 1305764
Micron MISTI/LID #: WMATBCAF00
Vendor Tool Serial #: MT3287
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: MTSN
Tool Model: AspenIII ICP_HT
Software Version (include revision #): 8.0B10
System Power Rating: 208V- 3-Phase
Loading Configuration: 4 load position
Retrofit Part Type 1: NA
Chamber Name 1: CHA
Chamber Name 2: CHB
Chamber 1 Description: 2 stage / chamber
Chamber 2 Description: 2 stage / chamber
Chamber 1 Chemicals Gases Used: PO2/CF4/4%H2N2/PN2
Chamber 2 Chemicals Gases Used: PO2/CF4/4%H2N2/PN2
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
Optional Gas 1: O2
Optional Gas 2: CF4
Optional Gas 3: 4%H2/N2
Optional Gas 4: N2
Optional Gas 5: CF4
Optional Gas 6: 4%H2/N2
Custom Gas Lines 1: 10SLM- AERA D980C
Custom Gas Lines 2: 200SCCM - AERA D980C
Custom Gas Lines 3: 5SLM - AERA D980C
Custom Gas Lines 4: 2SLM - AERA D980C
Custom Gas Lines 5: 50SCCM - AERA D980C
Custom Gas Lines 6: 500 SCCM - AERA D980
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
