Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
Tool has been shut down and in the clean room.
The install Type is Stand-Alone.
Off-Line Date is 2017/07/11.
All Cables are present.
The shipping Brackets are included.
Handler Type is Single wafer. (#FOUP loader)
Robot Type is RORZE RT130-521.
End-Effecter Type is RT130-521-B01.
SEMI Std Options is E84.
Power Supply is 208 VAC 60HZ 3P 31KVA.
AC Dist Box is 208 VAC 60HZ 3P 5KVA.
Heat Exchanger / Chiller is ATS DEX-20ADI *2.
Backing Pump(s) is Edward iXH1820 *3.
CDA is 160 LPM ,3/8” swagelok.
DIW is 20 LPM ,3/4” swagelok.
Vacuum is 30 LPM ,3/8” swagelok.
Power is 110V 2P.
The equipment no missing parts, but the UI computer HD is damaged.
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