Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2005
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: LAL
Tool config is based on original PO, please verify tool details at tool inspection
Tank: LAL30
Guide Material:PCTFE
Process Bath Material:PTFE
Temp.:20℃
Mixing Ratio (1): "LAL30
1:0"
Replenishment: Time Yes
Replenishment:Level Yes
Replenishment:Recipe Yes
Replenishment:Pre/Post/Interval Yes
Replenishment:Batch Count Yes
Bath Function:Bath Autocover Yes
Bath Function:Bath Cleaning Yes
Bath Function:Sampling Line Yes
Pump IWKI : FF-20-BT1
Heater Coolnics(NES-3123C-7-T)
Filter "IHAT01M01K
0.01um"
Conc. Monitor "CS-13M-777-
18P5390340P5P5"
Drain Line:WD1N Yes
Drain Line: WD2 (Neutralization Waste Water Treatment) Yes
Drain Line: WD3 (UPW Reclaim) Yes
Tank: QDR
Guide Material:PCTFE
Process Bath Material:Quartz
Temp.:RT
Bath Function: Over Flow Rinse Yes
Bath Function: Shower(Spray) Yes
Drain Line:WD1 (HF Waste Water) Yes
Drain Line:WD3 (UPW Reclaim) Yes
Tank: POU1
Guide Material:Quartz
Process Bath Material:PTFE
Temp.:RT/70℃
Mixing Ratio (1): NH4OH:H2O2:H20
Bath Function: Over Flow Rinse Yes
Bath Function: Shower(Spray) Yes
Bath Function: Agitation Yes
Bath Function: Megasonic SSDM 2800W
Bath Function: Hot DIW Generator PWH-144I-T-R
Bath Function:Sampling Line Yes
Cold DIW (Facility): 40 ~ 60 L/min
Hot DIW (Facility): 40 ~ 60 L/min
Conc. Monitor: "APM (CS-15M~)
Drain Line:WD1 (HF Waste Water) Yes
Drain Line: WD2 (Neutralization Waste Water Treatment) Yes
Drain Line: WD2N (Alkali Conc.) Yes
Drain Line: WD3 (UPW Reclaim) Yes
Tank: POU (Not used)
Guide Material:Quartz
Process Bath Material:PTFE
Temp.:RT/70℃
Mixing Ratio (1): HF:H2O
Tank: SD2
Guide Material:PCTFE
Process Bath Material:PTFE
Temp.:RT
Bath Function: Over Flow Rinse Yes
Bath Function:Bath Autocover Yes
Bath Function:N2 Purge Yes
Cold DIW (Facility): 40 ~ 60 L/min
Filter PIPW15C3S (Metal)
Drain Line: WD3 (UPW Reclaim) Yes
Drain Line: WD7 (Organic Waste Water) Yes
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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