Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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AMAT / Varian Semiconductor Equipment Associates (VSEA)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· S-Series EFEM with SinfoniaN2 loadports
· UES Buffer with low-force End Effectors
· Tilt Assembly: Tilt modes up to +45 degrees with accuracy of +0.1 degrees “Tilter C”
· Standard power kit
· High voltage warning display (X3)
· ICH source assembly. Vaporizer option
· Standard Gas Box – includes 3 toxic and 1 inert
o External Argon (position #1)
o SDS BF3 gas card (JY Bottle) (position #2)
o SDS Arsenic gas card (JY Bottle) (position #3)
o SDS Phosphorus gas card (JY Bottle) (position #4)
· Gas Supply Assy, PFG (Xenon)
· Faraday Assy, Dose
· Dose Assembly (mechanical)
· Profiler Driver Assembly
· Control System Kit
· Platen Assembly: Composite I+, 300mm
· Plasma Flood Gun Kit with Xenon readback option
· KF-40 RGA Port
· Manometer Kit, 2 readouts
· 300mm Loadlock Chamber Kit
· Diaphragm Vacuum Pump
· Triscoll Vacuum Pump
· Remote Service PC
· 300mm UHP N2 Option
· PRI 300mm Small WIP Buffer (4 FOUP door openers, E84 Compliant)
· Water-cooled CTI 9600 Cryogenic compressors (3 each) onboard stainless steel exhaust line
· Beam Energy Probe
· Pfeiffer Turbo Pump Kit: Source- two Pfeiffer HiPace 800 ; Loadlocks- two Pfeiffer HiPace 300 turbo pumps
· On-board Cryo Pump Upgrade
o Process Chamber: Four (4) CTI 250F High Capacity on-board cryo pumps
o Beamline: One (1) CTI 250F High Capacity on-board cryo pump
o Corrector Magnet: CTI 250F High Capacity on-board cryo pump
· Facilities input from bottom: Water, Air, N2, UHP N2
· Standard uncoated carbon beam liner shields (corrector magnet)
· Variable beam line aperture
· Scan Suppression feedback kit
· Wafer viewing monitor TV kit
· Rotating Mass Slit Assembly
· E-clamp Power Supply
· Graphite Air Bearing
· Remote Chiller
· Dose Controller (2 pass implant capability w/ PP+ upgrade), XP Tune Time
· Vesda Smoke Alarm System, Model VLC-500 detector
· Additional details available upon request
NOTE: Tool configuration shown is accurate to the knowledge of Intel Resale Corporation. Actual configuration may vary. All sales are “as is” and buyer is advised to conduct its own inspections. Other names and brands may be claimed as the property of others.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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