Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: VERSMTLHP
System Power Rating: 208 AC 3-Phase
Loading Configuration: 4 load ports
FI Model No. 2300e SN: 1017439-16-39-1823
Chamber 1 SN: 23MWS1580
Chamber 1: MW STRIP SN: 23MWS1580
Chamber 2: VERSMTLHP SN: 23MT-975 (F172979 PM2)
Chamber 3: VERSMTLHP SN: 23MT-976 (F172979 PM3)
Chamber 4: VERSMTLHP SN: 23MT-977 (F172979 PM4)
Chamber 5: MW STRIP SN: 23MWS1581
Custom Gas Lines
BCl3_200 sccm
Cl2_500 sccm
O2_100 sccm
CHF3_50 sccm
Ar_500 sccm
CH4_20 sccm
HCl_200 sccm
O2_3000 sccm
N2_50 sccm
Damage/Missing parts list
Missing- PM5 screen vacuum port of stripper
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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