Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2008-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
| Tool Model | V2 3 LP Kiyo MCX |
| Software Version | 1.8.4_SP5_HF2 |
| System Power Rating | 208 VAC |
| Loading Configuration | 3LPM |
| Any equipment manuals available? | No |
| Tool under OEM service contract? | No |
|
Chm/Unit
Position 1, 2, 3, 4 | sicl4 100, bcl3 300, CL2 500, HBR 500, CF4 400, O2 500,HE 500, CH2F2 200, AR 1000, 30%O2HE 50, NF3 1000, N2 250, SO2 200 |
|
MFC/Pressure
Unit: | STEC D219 |
| Drive Mechanisms: | Brooks 4 axis Reliance ATM and Brooks Mag7 VTM |
| FOUP Opener: | Brooks LPM |
| Gas System: | UFA Race track IGS gas box |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
