Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Varian Semiconductor Equipment Associates (VSEA) VIISta PLAD

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Asset ID: 208489

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Varian Semiconductor Equipment Associates (VSEA)

VIISta PLAD

High Dose Implant

Ion Implanters

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Tool config is based on original PO, please verify tool details at tool inspection


OEM: AMAT

Tool Model: VIISta PLAD

Software Version (include revision #): PLAD 09 10 729

System Power Rating: 208VAC 3PHase

Retrofit Part Type 1: NA

Chamber Name 1: R

Chamber Name 2: L

Chamber 1 Description: Right Chamber

Chamber 2 Description: Left Chamber

Chamber 1 Chemicals Gases Used: B2H6

Chamber 2 Chemicals Gases Used: BF3

N2 Load Port Exists 1: No

N2 Load Port Exists 2: No

Optional Gas 1: NA


Damage/Missing parts list

Missing- Service PC Qty 1

Missing- RFG (CHR) Qty 1

Missing- Lift pin assembly (CHR) Qty 1

Missing- UPC controller (CHR) Qty 1

Missing- Baffle cooling water connect Qty 1

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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