Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2007-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool is configured with 3 chamber
Standard Specification
Software Revision: Linux Ver6.75-Rev000-VSTD6.75a
OEE WPH Software: SW only for OEE throughput upgrade
Wafer Size: Diameter 300+/- 0.05mm(SEMI M1.15, Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 5 carrier stage (Continuous flow operation) with Semi compiant MENV and FIMS assemblies
Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve :OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Loader Module: SUS Parts, Ball screw & Liner guide : PTFE Coating
Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)
Load Lock Pressure Monitor: Pirani gauge : TTR216S LEYBOLD)
Load Lock Pressure Monitor: CM : 626A01TDE (MKS)
Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)
Water Leak Detector: 5 (LM;1, each PS;1)
Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)
Data Back up: USB & Ingenio (Ingenio Management Server)
EMO: 7 (Front x2, Rear x5)
Cable Length: 20m (Interconnection), 20m (RF cables)
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Fittings: No brass fittings
Supporting Remote Units
Chiller: DAIKIN:UBRPD5A-1T
Chiller Coolant: FC-3283
Chiller Hose: DRM 0X LTEMP / 19m (In;PTFE, Out;SUS)
Handy Maintenance Controller: LCD DISPLAY UT3-TLN7-8
RF Generator: GHW-55
RF Matcher: MWD-55LD
Pen Record Box: 2L80-00212-12
Loader Module: SELME2112ZS22-AD5
LOAD PORT: SELOP12F25-30U-14
DRIVE UNIT: SBX92102928
READER OPTICAL: ISS-1700-1TELCC
Carrier ID Reader: KEYENCE BCR:BL-601HAC1-S0
APC: 250mm
GBROR: NA
Hardware Configuration
Process Chb. 1,2,3: DRM Oxide Etch
Chamber Type: Y2O3 Coating
Chamber hardware: FCC high conductance/hole
Endpoint type: SE2000ii
ESC type: Ceramics ESC
Focus ring: Std 4mm COC
Orifice type He Gas Inlet: O
High-conductance depo shield: DEPO SHIELD ASSEMBLY, LD Y-Armor
Oring for Chamber: Armercrystal SC657
TMP: STP-A2203W1-U (SEIKO)
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)
Dry Pump: Ebara ESR100WN
Final Valve: Valve; AGD21V-6R-GWL4 (CKD)
Final Filter: Filter; CEP-TM-HL-VR-03PB (Toshiba Ceramic)
APC: Pendulum Motion Dia.; 250mm(V-TEX), R.T.~90deg
Oring for Chamber: Armercrystal SC657
Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa
Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa
Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor: ATM Switch : 41A13DGA2AA040 (MKS)
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS) (for H2/fluoro gas)
Gas Box Configuration
"Gas Line 1: Gas Line 1-H2-FCS-4WS-798-F200"
"Gas Line 2: Gas Line 2-C4F8-FCS-4WS-798-F122B"
"Gas Line 3: Gas Line 3-CH3F-FCS-4WS-798-F50"
"Gas Line 4: Gas Line 4-CH2F2-FCS-4WS-798-F200"
"Gas Line 5: Gas Line 5-CHF3-FCS-4WS-798-F260"
"Gas Line 6: Gas Line 6-CF4-FCS-4WS-798-F600"
"Gas Line 7: Gas Line 7-Ar-FCS-4WS-798-F850"
"Gas Line 8: Gas Line 8-O2-FCS-4WS-798-F50"
"Gas Line 9: Gas Line 9-O2-FCS-4WS-798-F1300"
"Gas Line 10: Gas Line 10-CO-FCS-4WS-798-F110"
"Gas Line 11: Gas Line 11-N2-FCS-4WS-798-F300"
"Gas Line 12: Gas Line 12-None-FCS-4WS-798-F600"
Purge: N2 (Process Grade N2)
Filter: CNF1004USG4 (Nihon Pall)
Regulator (Process gas): SQMICRO (VERIFLO)
Regulator (N2): SQMICRO (VERIFLO)
Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)
Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)
Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box)
Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)
Final Pressure Switch: 51A (MKS)
Pressure Gauge: Bourdon Gauge (with inside finishing) 0.2MPa
Pressure Gauge: Bourdon Gauge (with inside finishing)0.4MPa
SP3 Gas Line Connection: N/A
GBROR: GBROR
Process Kit Configuration
WINDOW,SHIELD DEPO(DRM2) Qtz: WINDOW,SHIELD DEPO(DRM2) Quartz
WINDOW DEPO SAF0.5(DRM2): WINDOW DEPO SAF0.5(DRM2)
KAPTON SHEET WINDOW (DRM2): BUSHING, WINDOW DEPO
INSULATOR RING: INSULATOR RING
INSULATOR,ESC ENCLOSURE,T3.5: INSULATOR,ESC ENCLOSURE,T3.5
ELECTRODE,UPPER Y(HAND): ELECTRODE,UPPER Y(HAND)
FOCUS RING,PM,4.0_380(SI)T: FOCUS RING,PM,4.0_380(SI)T
WINDOW DEPO(Y203): WINDOW DEPO(Y203)
BUSH,WINDOW DEPO: BUSH,WINDOW DEPO
SHUTTER ASSEMBLY, LD (Y): SHUTTER ASSEMBLY, LD (Y)
DEPO SHIELD ASSEM, LD Y-Armor: DEPO SHIELD ASSEMBLY, LD Y-Armor
PLATE EXH ASSY, LD-Y: PLATE EXH ASSY, LD-Y
ESC: ESC
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps, HDD and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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