Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

ASM International Eagle XP EmerALD

Asset ID: 205091

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ASM International

Eagle XP EmerALD

ALD (Atomic Layer Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2012

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Configuration :

Tool Model : XP Platform

System SW(OS) version is Ver 1. 58a1-001

All cables are present

Have missing /damaged parts need inspection to confirm.

Robot Type is Yawuski

Power Supply & AC Dist Box : P/N 1060-625-01

Backing Pump(s) : ALD/LL/WHC is EDWARDS-IXH1210

Heater Jacket : INTRACO TAIWAN CORPORATION

Facility Requirements :

CDA LLC PN2 : 403

DIW : 2.95

Vacuum Load Port vacuum : -86.2

Gas LLC Pressure : 0.56/0.209 MPA

FI : 100 Pa

Ar : 500 SCCM

N2 : 500 SCCM

Ar : 3 SLM

Differential : 3.5 Pa

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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