Macquarie Semiconductor and Technology on behalf of Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V. for its Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme IMS
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture:
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Duisburg, Germany
Available date: Currently Available
***Macquarie will manage the deinstallation, rigging, and crating at Buyer’s expense. Quotes for these services will be provided to buyer following tool award, or upon request.***
Shipping is the full responsibility of the buyer using their selected vendor, however transportation/shipping quotes are also available upon request.
ESTIMATED REMOVAL COSTS:
DEINTALLATION: $26,565.00
RIGGING: $19,291.78
WAREHOUSE HANDLING: $4,222.73
CRATING: $13,895.81
FINAL COSTS MAY BE DIFFERENT AND WILL BE BASED ON ACTUAL COSTS
Install Type Through-the-wall Original Ship Date 1997 Software Version V07.06 System Controller TS-4000Z Date of Last PM 2020 (last use) Is System On-Line? Yes CE Mark Certified Yes SECS/GEM Yes OEM Audit Available? No Decontamination Report Exists? No Can Produce Wafers AS IS? Yes Any Known Field Modifications? N All Cables Present? Yes Alpha-8S Oxide ATM TEL Model Number Alpha8S TEL Process Name Oxide Customer Process Name Oxide Temperature Range 960°C (max. 1025°C) Front Surface Finish White System Layout Type I Process Pressure Atmospheric Number of Zones 5 Temperature Controller Model Model 121 FTP heater No Inner TC Type In-line Rapid Cooling Unit No Boat Rotation Y Tube Seal Lip Seal Remote MMI and Gas Flow Chart Unknown - if yes, not in use Signal Lamp Tower Yes Gas Leak Detection Y Wafer Size 8 inch 26 slots. Wafer Type Notch Bolt-On-SMIF No Integrated SMIF No Stocker 21 slot Carrier N2 Purge System Yes Transfer Stage Wafer Position Sensor Yes Fork Wafer Present Sensor Yes Notch Alignment No (but, if yes, not in use) Fork Wafer Position Sensor Yes
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
