Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC

Ebara FREX300 Tungsten


The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.

Asset ID: 209722

Enquire about this product Print spec sheet


FREX300 Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2002-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

The equipment use of destructive methods to deinstallation the equipment.

Damage/Missing parts list, please inspect tool to reconfirm.

Dry pumps and customer provided items not included on sales

Inspect to confirm configuration and condition.

Install Type:Stand Alone

Number of Cassette / FOUP Positions is 4

Electrical Requirements:208V



No OEM Audit Available

Can't Produce Wafers AS IS

Signal Lamp Tower

No Clean Room Manuals

No Standard Manuals


Head Type:AI G2(Right) AI G2(Left)

Platen Type:Stainless Steel(Right)/Stainless Steel(Left) 

Platen Pad Conditioner

ELF=Extra-low force:Scan Dresser(Right)/Scan Dresser(Left) 

Slurry Delivery:Closed Loop(Right)/Closed Loop(Left)

Wafer Loss Camera:No(Right)/No(Left)

Wafer Slip-Out Sensor:No(Right)/No(Left)



Table Current Monitor (TCM):No(Right)/No(Left)

S-OPM Optical EPM ME10:Yes(Right)/Yes(Left)

Multi Process Monitor ME20 for EPD:No(Right)/No(Left)

R-ECM Eddy Current EPD:No(Right)/No(Left)

Cleaner 1 Type:Roller Brush(Right)/Roller Brush(Left)


   Chemical Line 1:Yes(Right)/Yes(Left)

   Chemical Line 2:Yes(Right)/Yes(Left)

Spin Rinse Dryer:Pencil BrushYes(Right)/Pencil Brush(Left)

Nova Type is NAt

Robot controller is Miss

Motor Driver is Damage

Cleaner Roller module is Damage

Touch Screen is Miss

Head motor is Damage

Platen driver is Damage

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.