Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2007
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process: Asher strip
Software Version: 1.91
System Power Rating: 208V 3-Phase
Loading Configuration: 3 load position
Chm/Unit Position 1- 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2
Chm/Unit Position 2- 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2
Main Body
Load Port
System wide corrosion free
Wafer Breakage Detection
LCD Monitor
System Controller
CPU
Hard disk
1st data back-up
2nd data back-up
Operation Monitor
Signal Tower
R.C.S(Remote Control System)
Utility
Main Power
UPS Power
Power Vaccine
Electric & signal cable Length
UPS Battery
Circuit Break Type
Water Manifold valve
All Utility Feed Direction
Transfer module
TM ROBOT Body
TM ROBOT Controller
TM ROBOT Power box
EFEM ROBOT
Chamber 1
Dry Pump
APC valve
APC Controller
Baratron Sensor
Pressure Transducer (pirani)
EPD Controller
Heater Module
FCIP-Generator
Gas Box- IGS Type
Pressure Control
Chamber 1 process gas line
GAS #1(O2)
GAS #2(N2)
GAS #4(H2N2)
GAS #6(CHF3)
Purity
MFC Signal
Gas Line Polishing
Regulator
Air Operated Valve
Filter
Pressure Transducer
Chamber 2
Dry Pump
APC valve
APC Controller
Baratron Sensor
Pressure Transducer (pirani)
EPD Controller
Heater Module
FCIP-Generator
Gas Box
Pressure Control
Chamber 2 process gas line
GAS #1(O2)
GAS #2(N2)
GAS #4(H2N2)
GAS #6(CHF3)
Purity
MFC Signal
Gas Line Polishing
Regulator
Air Operated Valve
Filter
Pressure Transducer
Damage/Missing parts list
side monitor abnormal- Qty 1
Chamber A gas3 /gas 5 regulator abnormal- Qty 2
Chamber B gas3 /gas 5 regulator abnormal- Qty 2
Chamber A pump line heater jacket control abnormal(CTR1-3)- Qty 1
Chamber B pump line heater jacket control abnormal(CTR2-3)- Qty 1
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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