Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture: 2001
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
Due to space factors, the equipment need to move out after destructive deinstallation.
Install Type is Stand-Alone.
Manufacturer Date is 2002
Date of last PM is 2014 MAY.
The system not On-Line
SEZ Spin Processor Model is SP/4300
UI (Front) is present
Status Lamp is present
Chuck Size (Left) is 12
Chuck Size (Right) is 12
No Flip Module
No End Point Detection System
Horiba concentration Monitor (HF Monitor)
ULPA Filter (Top of Main Unit)
FFU Replacement Date is 2013 May
Robot Support Plate is Present
Robot - CNTRL Filter Replacement Date is 2013 May
No Suck Back Box w/NT flow meter & manual reset
Number of Load-ports is 4 std
Load-port Size (Left) is 12
Load-port Size (Right) is 12
No Load-port Adapters (12->8)
No Wafer ID Reader
No RFID Reade
Chemical Module 1 is ST250
Chemical Delivery System (CDS) is ST250
No Buffer System for Chemical Cabinet
No Bulk Chem Delivery system (BCD)_Active
No Bulk Chem Delivery system (BCD)_Passive
All Cables are present
The power box and robot are missing.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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